Patents by Inventor George Michael Bleyle

George Michael Bleyle has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for unreacted precursor conversion and effluent removal
    Patent number: 6402806
    Abstract: A hot trap converts unreacted organic metal-film precursor from the exhaust stream of a CVD process. The converted precursor forms a metal film on the surface of the hot trap, thereby protecting hot vacuum pump surfaces from metal build up. A cold trap downstream from the hot trap freezes effluents from the exhaust stream. The metal captured by the hot trap and the effluents captured by the cold trap may then be recycled, rather than being released as environmental emissions.
    Type: Grant
    Filed: June 30, 2000
    Date of Patent: June 11, 2002
    Assignee: Applied Materials, Inc.
    Inventors: John Vincent Schmitt, Ling Chen, George Michael Bleyle, Yu Cong, Alfred Mak, Mei Chang
  • Chemical vapor deposition hot-trap for unreacted precursor conversion and effluent removal
    Patent number: 6099649
    Abstract: A hot trap converts unreacted organic metal-film precursor from the exhaust stream of a CVD process. The converted precursor forms a metal film on the surface of the hot trap, thereby protecting hot vacuum pump surfaces from metal build up. A cold trap downstream from the hot trap freezes effluents from the exhaust stream. The metal captured by the hot trap and the effluents captured by the cold trap may then be recycled, rather than being released as environmental emissions.
    Type: Grant
    Filed: December 23, 1997
    Date of Patent: August 8, 2000
    Assignee: Applied Materials, Inc.
    Inventors: John Vincent Schmitt, Ling Chen, George Michael Bleyle, Yu Cong, Alfred Mak, Mei Chang