Patents by Inventor George R. Campbell

George R. Campbell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for planarizing a semiconductor layer
    Patent number: 5728507
    Abstract: A moat pattern (19) is formed in a first layer of material (11) to improve the profile of a planarization process. The presence of the moat pattern (19) in the periphery of a semiconductor substrate (10,30) moves the effects of the relaxation distance (13) away from the critical areas of the semiconductor substrate (30). The moat pattern (19) is formed during a photolithographic process by using a photolithographic mask (20) that has a portion (22) that defines and patterns the moat pattern (19). The moat pattern (19) is defined as edge dice (31) are patterned across the semiconductor substrate (30).
    Type: Grant
    Filed: February 20, 1996
    Date of Patent: March 17, 1998
    Assignee: Motorola, Inc.
    Inventors: Robert L. Rhoades, George R. Campbell, Steven D. Frezon, Mark D. Hall