Abstract: without substantially touching the surface, having annular rings forming annular orifices, one of the rings forming an air bearing portion and having passages through which a flow of a gas can be established in a first direction, where the flow of the gas is sufficient to create a cushion of air between the puck and the surface, and at least some of the orifices for drawing vacuums through the orifices in a second direction opposite to the first direction against the surface.

Abstract: An SEM wherein the entire imaging apparatus of the SEM is supported on air bearings. A multi-stage differentially pumped vacuum seal area provides a localized vacuum zone for wafer examination. A wafer leveling mechanism insures that the top surface of the wafer being examined is placed and maintained in a position level with the surface upon which the air bearing supported SEM rests. The SEM can move on its air bearings such that any portion of the wafer can be examined. A voltage-isolating passageway for providing high voltage isolation between a component maintained at high DC voltage and a component maintained at a substantially lower voltage is described. The voltage-isolating passageway incorporates a transverse magnetic field across its passageway. The voltage-isolating passageway includes at least two magnets that are positioned along opposite and exterior surfaces of the passageway. A semi-conductive coating can be applied to the interior passageway surface.

Abstract: An embodiment of the present invention comprises a SEM wherein the entire imaging apparatus of the SEM is supported on air bearings. A multi-stage differentially pumped vacuum seal area provides a localized vacuum zone for wafer examination. A wafer leveling mechanism insures that the top surface of the wafer being examined is place and maintained in a position level with the surface upon which the air bearing supported SEM rests. In use, wafers being examined are loaded into the wafer leveling mechanism, which places and then holds their top surface flush with an examination table. The SEM is then moved on its air bearings and placed in appropriate position over the wafer. Any portion of the wafer can be examined simply by moving the SEM column in the appropriate direction.

Abstract: A mobile transport unit for independently operating within an enclosed environment. The transport unit is adapted for carrying a robotic manipulator arm and cargo within the environment, and includes an infrared communications transmitter/receiver for communicating with an extra-vehicular central processing unit. The transport unit includes electric motors for driving and for steering the unit. A laser docking module precisely determines the vehicle's location relative to a fixed point within the environment. Ultrasonic sensors placed about the vehicle can detect objects within a preselected range for collision avoidance and safety purposes. The vehicle is controlled by a central computer which receives inputs from the infrared communications system and from on-board sensors including directional sensors, distance measuring sensors, a gyroscope, the ultrasonic sensors, and the docking module.

Abstract: A loadlock apparatus for a workpiece processing chamber such as those incorporated in vacuum processing systems. The apparatus includes an isolation chamber having evacuation apertures and workpiece transfer apertures with independently operable doors for closing and sealing the workpiece transfer apertures and an independent operable workpiece transfer mechanism. The doors and workpiece transfer mechanisms may be contained within the isolation chamber and the chamber may be closed and sealed while containing a workpiece. The door and workpiece transfer mechanisms may be adapted such that they are not positioned over the workpiece, thereby reducing the possibility of workpiece particulate contamination.The preferred embodiment of the workpiece transfer mechanism moves a workpiece through the isolation chamber along a path which is essentially a straight line.

Abstract: A loadlock apparatus for a workpiece processing chamber such as those incorporated in vacuum processing systems. The apparatus includes an isolation chamber having evacuation apertures and workpiece transfer apertures with independently operable doors for closing and sealing the workpiece transfer apertures and an independent operable workpiece transfer mechanism. The doors and workpiece transfer mechanisms may be contained within the isolation chamber and the chamber may be closed and sealed while containing a workpiece. The door and workpiece transfer mechanisms may be adapted such that they are not positioned over the workpiece, thereby reducing the possibility of workpiece particulate contamination.The preferred embodiment of the workpiece transfer mechanism moves a workpiece through the isolation chamber along a path which is essentially a straight line.

Abstract: A screen lens array system including a lens cover plate or top plate and a screen lens array or bottom plate for use in a parallel charged particle beam exposure system is disclosed. The screen lens array, which comprises a pair of lens plates mutually aligned with respect to one another, breaks up a flood beam of charged particles into a multiplicity of beams in parallel and focuses them onto a substrate target surface.The charged particle flood beam impinges the smaller apertures, of the upper lens plate, which serve as apertures to control image aberrations. The larger set of apertures, of the lower lens plate, are influenced by the electric field between the screen lens array and the target surface to form the embodiment of most of the lens action.Mounted above and displaced from the screen lens array is the lens cover plate which also contains an array of apertures.By imparting a linear, mechanical motion to the top plate, it selectively controls, i.e.

Abstract: A plasma processing chamber incorporating parallel plate electrodes whose separation may be mechanically adjusted from the outside thereof. The chamber includes a sealable assembly including an electrode housing and a reaction chamber body. The body includes an aperture to receive a planar surfaced terminal end of the housing. The aperture is constructed to permit the housing to be easily translated with respect to the body. One electrode surface of the chamber is established on the end of the housing thus received. The other electrode is provided by a corresponding surface within the body. Entry of atmospheric gases into the space between the electrode's surfaces is barred by a sliding, dual, differentially pumped seal between the housing's surface and the aperture's surface. Also incorporated into the processing chamber are four jackscrews aligned parallel to the axis of the housing.

Abstract: An improved method and apparatus for facilitating specimen handling during freezing, coating and transfer to and from the main chamber of an SEM. A unique specimen shuttle manipulable by a control rod permits transfer of a specimen between the main chamber and an auxiliary air lock chamber alternatively defined by an air lock housing and a coating apparatus housing. Either housing is removably attached to an entrance flange communicating via a gate valve assembly with the main chamber and is provided with a sealable access aperture for enabling transfer of both frozen and unfrozen specimens to and from the airlock chamber. The specimen manipulator enables specimen attachment and removal from the shuttle and has a frost shield for eliminating frost formation on the specimen surface during handling after freezing.