Patents by Inventor George R. Mulfinger

George R. Mulfinger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240128322
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a device with a laterally graded channel region and methods of manufacture. The structure includes a PFET region with a laterally graded semiconductor channel region under a gate material.
    Type: Application
    Filed: October 18, 2022
    Publication date: April 18, 2024
    Inventor: George R. MULFINGER
  • Patent number: 11907685
    Abstract: Disclosed is a structure for implementing a Physically Unclonable Function (PUF)-based random number generator and a method for forming the structure. The structure includes same-type, same-design devices in a semiconductor layer. While values of a performance parameter exhibited by some devices (i.e., first devices) are within a range established based on the design, values of the same performance parameter exhibited by other devices (i.e., second devices) is outside that range. A random distribution of the first and second devices is achieved by including randomly patterned dopant implant regions in the semiconductor layer. Each first device is separated from the dopant implant regions such that its performance parameter value is within the range and each second device has a junction with dopant implant region(s) such that its performance parameter value is outside the range or vice versa. A random number generator can be operably connected to the devices to generate a PUF-based random number.
    Type: Grant
    Filed: November 8, 2019
    Date of Patent: February 20, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Judson R. Holt, Julien Frougier, Ryan W. Sporer, George R. Mulfinger, Daniel Jaeger
  • Publication number: 20230352348
    Abstract: Disclosed are a semiconductor structure and method of forming the structure. The structure has a semiconductor layer. A gate structure is located on the semiconductor layer. The gate structure has a sidewall spacer having a first section on the semiconductor layer and positioned laterally adjacent to the gate structure and further having a second section above and wider than the first section and positioned laterally adjacent the gate structure. A source/drain region is on the semiconductor layer and positioned laterally adjacent to the first section and the second section of the sidewall spacer.
    Type: Application
    Filed: April 29, 2022
    Publication date: November 2, 2023
    Applicant: GlobalFoundries U.S. Inc.
    Inventors: George R. Mulfinger, Md Nasir Uddin Bhuyian, Shesh Mani Pandey, Adam S. Rosenfeld, Selina A. Mala
  • Patent number: 11798948
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to semiconductor devices with a shared common backside well and methods of manufacture. The structure includes: adjacent gate structures over a semiconductor substrate; a common well in the semiconductor substrate under the adjacent gate structures; a deep trench isolation structure extending through the common well between the adjacent gate structures; and a shared diffusion region between the adjacent gate structures.
    Type: Grant
    Filed: October 7, 2021
    Date of Patent: October 24, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Kaustubh Shanbhag, Eric S. Kozarsky, George R. Mulfinger, Jianwei Peng
  • Publication number: 20230146952
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to transistors with faceted raised source/drain regions and methods of manufacture. The structure includes: a substrate; a gate structure on the substrate; and faceted, raised source/drain regions adjacent to the gate structure and including at least two different semiconductor materials.
    Type: Application
    Filed: November 8, 2021
    Publication date: May 11, 2023
    Inventors: George R. MULFINGER, Matthew W. STOKER, Ryan W. SPORER, Man GU
  • Publication number: 20230112377
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to semiconductor devices with a shared common backside well and methods of manufacture. The structure includes: adjacent gate structures over a semiconductor substrate; a common well in the semiconductor substrate under the adjacent gate structures; a deep trench isolation structure extending through the common well between the adjacent gate structures; and a shared diffusion region between the adjacent gate structures.
    Type: Application
    Filed: October 7, 2021
    Publication date: April 13, 2023
    Inventors: Kaustubh Shanbhag, Eric S. Kozarsky, George R. Mulfinger, Jianwei Peng
  • Publication number: 20230047046
    Abstract: Structures for a photonics chip that include a fully-depleted silicon-on-insulator field-effect transistor and related methods. A first device region of a substrate includes a first device layer, a first portion of a second device layer, and a buried insulator layer separating the first device layer from the first portion of the second device layer. A second device region of the substrate includes a second portion of the second device layer. The first device layer, which has a thickness in a range of about 4 to about 20 nanometers, transitions in elevation to the second portion of the second device layer with a step height equal to a sum of the thicknesses of the first device layer and the buried insulator layer. A field-effect transistor includes a gate electrode on the top surface of the first device layer. An optical component includes the second portion of the second device layer.
    Type: Application
    Filed: October 26, 2022
    Publication date: February 16, 2023
    Inventors: Ryan Sporer, George R. Mulfinger, Yusheng Bian
  • Publication number: 20230038887
    Abstract: Structures for a photonics chip that include a fully-depleted silicon-on-insulator field-effect transistor and related methods. A first device region of a substrate includes a first device layer, a first portion of a second device layer, and a buried insulator layer separating the first device layer from the first portion of the second device layer. A second device region of the substrate includes a second portion of the second device layer. The first device layer, which has a thickness in a range of about 4 to about 20 nanometers, transitions in elevation to the second portion of the second device layer with a step height equal to a sum of the thicknesses of the first device layer and the buried insulator layer. A field-effect transistor includes a gate electrode on the top surface of the first device layer. An optical component includes the second portion of the second device layer.
    Type: Application
    Filed: August 5, 2021
    Publication date: February 9, 2023
    Inventors: Ryan Sporer, George R. Mulfinger, Yusheng Bian
  • Patent number: 11569268
    Abstract: Structures for a photonics chip that include a fully-depleted silicon-on-insulator field-effect transistor and related methods. A first device region of a substrate includes a first device layer, a first portion of a second device layer, and a buried insulator layer separating the first device layer from the first portion of the second device layer. A second device region of the substrate includes a second portion of the second device layer. The first device layer, which has a thickness in a range of about 4 to about 20 nanometers, transitions in elevation to the second portion of the second device layer with a step height equal to a sum of the thicknesses of the first device layer and the buried insulator layer. A field-effect transistor includes a gate electrode on the top surface of the first device layer. An optical component includes the second portion of the second device layer.
    Type: Grant
    Filed: August 5, 2021
    Date of Patent: January 31, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Ryan Sporer, George R. Mulfinger, Yusheng Bian
  • Patent number: 11450573
    Abstract: A structure and method use different stress-inducing isolation dielectrics to induce appropriate stresses in different polarity FETs to improve performance of both type FETs. The structure may include a first stress-inducing isolation dielectric surrounding and contacting a first active region for a p-type field effect transistor (PFET), and a second stress-inducing isolation dielectric surrounding and contacting a second active region for an n-type field effect transistor (NFET). The first and second stress-inducing isolation dielectrics induce different types of stress, thus improving performance of both polarity of FETs.
    Type: Grant
    Filed: June 17, 2020
    Date of Patent: September 20, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: George R. Mulfinger, Chung F. Tan, Ryan W. Sporer
  • Publication number: 20210398862
    Abstract: A structure and method use different stress-inducing isolation dielectrics to induce appropriate stresses in different polarity FETs to improve performance of both type FETs. The structure may include a first stress-inducing isolation dielectric surrounding and contacting a first active region for a p-type field effect transistor (PFET), and a second stress-inducing isolation dielectric surrounding and contacting a second active region for an n-type field effect transistor (NFET). The first and second stress-inducing isolation dielectrics induce different types of stress, thus improving performance of both polarity of FETs.
    Type: Application
    Filed: June 17, 2020
    Publication date: December 23, 2021
    Inventors: George R. Mulfinger, Chung F. Tan, Ryan W. Sporer
  • Patent number: 11127843
    Abstract: Structures for a heterojunction bipolar transistor and methods of forming a structure for a heterojunction bipolar transistor. A base layer is positioned in a cavity in a semiconductor layer, a first terminal is coupled to the base layer, and a second terminal is coupled to a portion of the semiconductor layer. The second terminal is laterally spaced from the first terminal, and the portion of the semiconductor layer is laterally positioned between the second terminal and the base layer.
    Type: Grant
    Filed: January 3, 2020
    Date of Patent: September 21, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Judson Holt, Alexander Derrickson, Ryan Sporer, George R. Mulfinger, Alexander Martin, Jagar Singh
  • Patent number: 11101364
    Abstract: Structures for a field-effect transistor and methods of forming a field-effect transistor. A gate structure of the field-effect transistor is arranged over an active region comprised of a semiconductor material. A first sidewall spacer is arranged adjacent to the gate structure. A second sidewall spacer includes a section arranged between the first sidewall spacer and the active region. The first sidewall spacer is composed of a low-k dielectric material.
    Type: Grant
    Filed: March 8, 2019
    Date of Patent: August 24, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: George R. Mulfinger, Hong Yu, Man Gu, Jianwei Peng, Michael Aquilino
  • Patent number: 11094805
    Abstract: Structures for a heterojunction bipolar transistor and methods of forming a structure for a heterojunction bipolar transistor. A first portion of a first semiconductor layer defines an emitter, a first portion of a second semiconductor layer defines a collector, and a base includes respective second portions of the first and second semiconductor layers that are laterally positioned between the first portion of the first semiconductor layer and the first portion of the second semiconductor layer. The first portion of the first semiconductor layer has a first thickness, and the first portion of the second semiconductor layer has a second thickness that is greater than the first thickness. The first portion and the second portion of the first semiconductor layer adjoin at a first junction having the first thickness. The first portion and the second portion of the second semiconductor layer adjoin at a second junction having the second thickness.
    Type: Grant
    Filed: January 17, 2020
    Date of Patent: August 17, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Alexander Derrickson, Edmund K. Banghart, Alexander Martin, Ryan Sporer, Jagar Singh, Katherina Babich, George R. Mulfinger
  • Publication number: 20210226044
    Abstract: Structures for a heterojunction bipolar transistor and methods of forming a structure for a heterojunction bipolar transistor. A first portion of a first semiconductor layer defines an emitter, a first portion of a second semiconductor layer defines a collector, and a base includes respective second portions of the first and second semiconductor layers that are laterally positioned between the first portion of the first semiconductor layer and the first portion of the second semiconductor layer. The first portion of the first semiconductor layer has a first thickness, and the first portion of the second semiconductor layer has a second thickness that is greater than the first thickness. The first portion and the second portion of the first semiconductor layer adjoin at a first junction having the first thickness. The first portion and the second portion of the second semiconductor layer adjoin at a second junction having the second thickness.
    Type: Application
    Filed: January 17, 2020
    Publication date: July 22, 2021
    Inventors: Alexander Derrickson, Edmund K. Banghart, Alexander Martin, Ryan Sporer, Jagar Singh, Katherina Babich, George R. Mulfinger
  • Patent number: 11031484
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to differential silicide structures and methods of manufacture. The structure includes: a substrate; a gate structure comprising a silicided gate region; and source and drain regions adjacent to the gate structure and comprising S/D silicided regions having a differential thickness compared to the silicided gate region.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: June 8, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: George R. Mulfinger, Judson R. Holt, Mark Raymond
  • Publication number: 20210141610
    Abstract: Disclosed is a structure for implementing a Physically Unclonable Function (PUF)-based random number generator and a method for forming the structure. The structure includes same-type, same-design devices in a semiconductor layer. While values of a performance parameter exhibited by some devices (i.e., first devices) are within a range established based on the design, values of the same performance parameter exhibited by other devices (i.e., second devices) is outside that range. A random distribution of the first and second devices is achieved by including randomly patterned dopant implant regions in the semiconductor layer. Each first device is separated from the dopant implant regions such that its performance parameter value is within the range and each second device has a junction with dopant implant region(s) such that its performance parameter value is outside the range or vice versa. A random number generator can be operably connected to the devices to generate a PUF-based random number.
    Type: Application
    Filed: November 8, 2019
    Publication date: May 13, 2021
    Applicant: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Judson R. Holt, Julien Frougier, Ryan W. Sporer, George R. Mulfinger, Daniel Jaeger
  • Publication number: 20210091212
    Abstract: Structures for a heterojunction bipolar transistor and methods of forming a structure for a heterojunction bipolar transistor. A base layer is positioned in a cavity in a semiconductor layer, a first terminal is coupled to the base layer, and a second terminal is coupled to a portion of the semiconductor layer. The second terminal is laterally spaced from the first terminal, and the portion of the semiconductor layer is laterally positioned between the second terminal and the base layer.
    Type: Application
    Filed: January 3, 2020
    Publication date: March 25, 2021
    Inventors: Judson Holt, Alexander Derrickson, Ryan Sporer, George R. Mulfinger, Alexander Martin, Jagar Singh
  • Publication number: 20200411666
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to differential silicide structures and methods of manufacture. The structure includes: a substrate; a gate structure comprising a silicided gate region; and source and drain regions adjacent to the gate structure and comprising S/D silicided regions having a differential thickness compared to the silicided gate region.
    Type: Application
    Filed: June 28, 2019
    Publication date: December 31, 2020
    Inventors: George R. MULFINGER, Judson R. HOLT, Mark RAYMOND
  • Patent number: 10825897
    Abstract: One illustrative method disclosed herein may include forming a first straight sidewall spacer adjacent a gate structure of a transistor, forming a recessed layer of sacrificial material adjacent the first straight sidewall spacer and forming a second straight sidewall spacer on a portion of the outer surface of the first straight sidewall spacer and above the recessed layer of sacrificial material. The method may also include removing the recessed layer of sacrificial material so as to expose a first vertical portion of the outer surface of the first straight sidewall spacer and forming an epi material on and above the substrate, wherein an edge of the epi material engages the first straight sidewall spacer.
    Type: Grant
    Filed: January 30, 2019
    Date of Patent: November 3, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Wei Hong, George R. Mulfinger, Hui Zang, Liu Jiang, Zhenyu Hu