Patents by Inventor George S. Powers

George S. Powers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of processing a semiconductor device
    Patent number: 6047480
    Abstract: Alignment of a blade (60) to an electrostatic chuck (53) is accomplished using an alignment tool (30) and an alignment pin (40) to align a port (534) in the electrostatic chuck (53) directly to a hole (602) in the blade (60). Placement of a substrate (70) in a processing chamber (50) is accomplished using a substrate handler configured with the blade (60) to place the substrate (70) accurately on the electrostatic chuck (53). The substrate (70) is then processed in the processing chamber (50) using the electrostatic chuck (53).
    Type: Grant
    Filed: April 13, 1998
    Date of Patent: April 11, 2000
    Assignee: Motorola, Inc.
    Inventor: George S. Powers