Patents by Inventor George W. Banke, Jr.
George W. Banke, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 8990961Abstract: Determination of non-linearity of a positioning scanner of a measurement tool is disclosed. In one embodiment, a method may include providing a probe of a measurement tool coupled to a positioning scanner; scanning a surface of a first sample with the surface at a first angle relative to the probe to attain a first profile; scanning the surface of the first sample with the surface at a second angle relative to the probe that is different than the first angle to attain a second profile; repeating the scannings to attain a plurality of first profiles and a plurality of second profiles; and determining a non-linearity of the positioning scanner using the different scanning angles to cancel out measurements corresponding to imperfections due to the surface of the sample. The non-linearity may be used to calibrate the positioning scanner.Type: GrantFiled: August 25, 2011Date of Patent: March 24, 2015Assignee: International Business Machines CorporationInventors: George W. Banke, Jr., James M. Robert, Carlos Strocchia-Rivera
-
Publication number: 20110314576Abstract: Determination of non-linearity of a positioning scanner of a measurement tool is disclosed. In one embodiment, a method may include providing a probe of a measurement tool coupled to a positioning scanner; scanning a surface of a first sample with the surface at a first angle relative to the probe to attain a first profile; scanning the surface of the first sample with the surface at a second angle relative to the probe that is different than the first angle to attain a second profile; repeating the scannings to attain a plurality of first profiles and a plurality of second profiles; and determining a non-linearity of the positioning scanner using the different scanning angles to cancel out measurements corresponding to imperfections due to the surface of the sample. The non-linearity may be used to calibrate the positioning scanner.Type: ApplicationFiled: August 25, 2011Publication date: December 22, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: George W. Banke, JR., James M. Robert, Carlos Strocchia-Rivera
-
Patent number: 8037736Abstract: Determination of non-linearity of a positioning scanner of a measurement tool is disclosed. In one embodiment, a method may include providing a probe of a measurement tool coupled to a positioning scanner; scanning a surface of a first sample with the surface at a first angle relative to the probe to attain a first profile; scanning the surface of the first sample with the surface at a second angle relative to the probe that is different than the first angle to attain a second profile; repeating the scannings to attain a plurality of first profiles and a plurality of second profiles; and determining a non-linearity of the positioning scanner using the different scanning angles to cancel out measurements corresponding to imperfections due to the surface of the sample. The non-linearity may be used to calibrate the positioning scanner.Type: GrantFiled: January 14, 2008Date of Patent: October 18, 2011Assignee: International Business Machines CorporationInventors: George W. Banke, Jr., James M. Robert, Carlos Strocchia-Rivera
-
Patent number: 7812347Abstract: A method for measuring an integrated circuit (IC) structure by measuring an imprint of the structure, a method for preparing a test site for the above measuring, and IC so formed. The method for preparing the test site includes incrementally removing the structure from the substrate so as to reveal an imprint of the removed bottom surface of the structure in a top surface of the substrate. The imprint can then be imaged using an atomic force microscope (AFM). The image can be used to measure the bottom surface of the structure.Type: GrantFiled: March 7, 2008Date of Patent: October 12, 2010Assignee: International Business Machines CorporationInventors: George W. Banke, Jr., Andrew Deering, Philip V. Kaszuba, Leon Moszkowicz, James Robert, James A. Slinkman
-
Patent number: 7571070Abstract: A method, system and program product are disclosed for optimizing a fleet of measurement systems. One embodiment determines a tool matching precision (TMP) and a fleet measurement precision (FMP) and normalizes these metrics across applications. An optimization is carried out in which usage weighting factors are assigned to each measurement system while enforcing usage enforcement rule(s) to ensure that each measurement system is optimally used and each application is adequately covered. The optimization re-assigns usage weighting factors to minimize a normalized FMP metric and enforce the usage enforcement rule(s).Type: GrantFiled: August 30, 2006Date of Patent: August 4, 2009Assignee: International Business Machines CorporationInventors: Eric P. Solecky, Charles N. Archie, George W. Banke, Jr.
-
Publication number: 20090178472Abstract: Determination of non-linearity of a positioning scanner of a measurement tool is disclosed. In one embodiment, a method may include providing a probe of a measurement tool coupled to a positioning scanner; scanning a surface of a first sample with the surface at a first angle relative to the probe to attain a first profile; scanning the surface of the first sample with the surface at a second angle relative to the probe that is different than the first angle to attain a second profile; repeating the scannings to attain a plurality of first profiles and a plurality of second profiles; and determining a non-linearity of the positioning scanner using the different scanning angles to cancel out measurements corresponding to imperfections due to the surface of the sample. The non-linearity may be used to calibrate the positioning scanner.Type: ApplicationFiled: January 14, 2008Publication date: July 16, 2009Inventors: George W. Banke, JR., James M. Robert, Carlos Strocchia-Rivera
-
Patent number: 7532999Abstract: Methods, systems and program products are disclosed for determining whether a measurement system under test (MSUT) matches a fleet including at least one other measurement system. The invention implements realistic parameters for analyzing a matching problem including single tool precision, tool-to-tool non-linearities and tool-to-tool offsets. A bottom-line tool matching precision metric that combines these parameters into a single value is then implemented. The invention also includes methods for determining a root cause issue of a matching problem, and for determining a fleet measurement precision metric. Method, system and program product are also disclosed for attempting to determine a root cause of a subject problem related to at least one of a measurement system under test (MSUT) and a fleet of at least one other measurement system.Type: GrantFiled: October 7, 2005Date of Patent: May 12, 2009Assignee: International Business Machines CorporationInventors: Charles N. Archie, George W. Banke, Jr., Eric P. Solecky
-
Patent number: 7507591Abstract: A method for measuring an integrated circuit (IC) structure by measuring an imprint of the structure, a method for preparing a test site for the above measuring, and IC so formed. The method for preparing the test site includes incrementally removing the structure from the substrate so as to reveal an imprint of the removed bottom surface of the structure in a top surface of the substrate. The imprint can then be imaged using an atomic force microscope (AFM). The image can be used to measure the bottom surface of the structure.Type: GrantFiled: June 8, 2005Date of Patent: March 24, 2009Assignee: International Business Machines CorporationInventors: George W. Banke, Jr., Andrew Deering, Philip V. Kaszuba, Leon Moszkowicz, James Robert, James A. Slinkman
-
Patent number: 7467063Abstract: Methods, systems and program products are disclosed for determining whether a measurement system under test (MSUT) matches a fleet including at least one other measurement system. The invention implements realistic parameters for analyzing a matching problem including single tool precision, tool-to-tool non-linearities and tool-to-tool offsets. A bottom-line tool matching precision metric that combines these parameters into a single value is then implemented. The invention also includes methods for determining a root cause of a matching problem, and for determining a fleet measurement precision metric.Type: GrantFiled: October 2, 2007Date of Patent: December 16, 2008Assignee: International Business Machines CorporationInventors: Charles N. Archie, George W. Banke, Jr., Eric P. Solecky
-
Patent number: 7353128Abstract: Optimizing a measurement system under test (MSUT) is disclosed. In one embodiment, a method includes selecting a first set of adjustable parameters of the MSUT that affect a quality metric for the MSUT, calculating the quality metric over a range of values of each adjustable parameter in the first set of adjustable parameters, generating a first multidimensional response space based on the calculating step, and determining which value of each adjustable parameter optimizes the quality metric based on the first multidimensional response space. The multidimensional response space may be stored for later recall for other optimization exercises.Type: GrantFiled: February 15, 2006Date of Patent: April 1, 2008Assignee: International Business Machines CorporationInventors: Charles N. Archie, George W. Banke, Jr., Eric P. Solecky
-
Patent number: 7340374Abstract: Methods, systems and program products are disclosed for determining whether a measurement system under test (MSUT) matches a fleet including at least one other measurement system. The invention implements realistic parameters for analyzing a matching problem including single tool precision, tool-to-tool non-linearities and tool-to-tool offsets. A bottom-line tool matching precision metric that combines these parameters into a single value is then implemented. The invention also includes methods for determining a root cause of a matching problem, and for determining a fleet measurement precision metric.Type: GrantFiled: February 25, 2005Date of Patent: March 4, 2008Assignee: International Business Machines corporationInventors: Charles N. Archie, George W. Banke, Jr., Eric P. Solecky