Patents by Inventor George X. Guo

George X. Guo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8500962
    Abstract: A method for substrate processing includes producing a magnetic field by a magnetron across the full width of a sputtering surface of a target in a first direction. The magnetron can produce two erosion grooves separated by a distance S on the sputtering surface. The method includes moving the magnetron continuously at a first speed by the distance S in a first segment along a linear travel path. The linear travel path is along a second direction perpendicular to the first direction. The method includes continuously sputtering a material off the sputtering surface and depositing the material on the substrate during the first segment, and moving the magnetron by the distance S in a second segment along the linear travel path at a second speed higher than the first speed without sputtering the material off the sputtering surface or sputtering materials off at significant lower rate.
    Type: Grant
    Filed: June 15, 2011
    Date of Patent: August 6, 2013
    Assignee: Ascentool Inc
    Inventors: George X. Guo, Kai-an Wang
  • Patent number: 8408858
    Abstract: A substrate processing system includes a first load lock, a process chamber having a first opening to allow an exchange of a substrate between the first load lock and the first process chamber, first rollers in the process chamber; and second rollers in the first load lock, wherein the first rollers and the second rollers are configured to transport a substrate thereon through the first opening between the first load lock and the process chamber. At least some of the first rollers and the second rollers are idler rollers.
    Type: Grant
    Filed: August 22, 2010
    Date of Patent: April 2, 2013
    Assignee: Ascentool International Limited
    Inventors: George X. Guo, Kai-an Wang
  • Publication number: 20130015056
    Abstract: A vacuum processing system includes a vacuum chamber that can contain a workpiece therein, a deposition source unit that provides a material to be deposited on the workpiece in vacuum, and a cooling module in thermal contact with the deposition source unit. The cooling module includes one or more holding wells that can contain a cooling liquid. The cooling module can cool the deposition source unit by a loss of latent heat during the evaporation of the cooling liquid.
    Type: Application
    Filed: July 15, 2011
    Publication date: January 17, 2013
    Inventor: George X. Guo
  • Publication number: 20120298169
    Abstract: A multi junction photovoltaic device includes lower pn junction layers comprising silicon and upper pn junction layers formed over the lower pn junction layers. The upper pn junction layers include a CdTe layer, wherein the upper pn junction layers are electrically serially connected to the lower pn junction layers. The upper pn junction layers can convert a first portion of photons into a first electric voltage. The lower pn junction layers can convert a second portion of photons into a second electric voltage lower than the first electric voltage.
    Type: Application
    Filed: November 18, 2011
    Publication date: November 29, 2012
    Inventors: George X. Guo, Zhengyu Zhang
  • Publication number: 20120207916
    Abstract: A vacuum processing system includes a vacuum chamber in connection with a vacuum pump that can exhaust air or vapor in the vacuum chamber, and a container in the vacuum chamber configured to contain one or more work pieces therein and to receive a heat-exchange liquid that comes into contact with the one or more work pieces to allow heat exchange with the one or more work pieces. The vacuum pump can exhaust at least a portion of the vapor evaporated from the heat-exchange liquid on the work pieces or in the container. A deposition source unit can provide material to be deposited on the one or more work pieces in vacuum. The one or more work pieces can be brought a predetermined temperature by the heat-exchange liquid.
    Type: Application
    Filed: June 29, 2011
    Publication date: August 16, 2012
    Inventor: George X. Guo
  • Patent number: 8236152
    Abstract: A deposition system includes a chamber, a plurality of targets in a center region in the chamber and a plurality of substrates in the chamber. The targets are sequentially positioned when viewed in a first direction. At least one of the targets includes a sputtering surface facing outward. The substrates are sequentially positioned when viewed in the first direction. At least one of the substrates includes a deposition surface configured to receive material sputtered off the sputtering surface.
    Type: Grant
    Filed: November 24, 2006
    Date of Patent: August 7, 2012
    Assignee: Ascentool International Ltd.
    Inventors: George X. Guo, Kai-an Wang
  • Publication number: 20120111270
    Abstract: A plasma-enhanced substrate processing system includes a magnetic-field generation unit that can create a substantially uniform magnetic field along an axial direction in a spatial region, a processing chamber in the spatial region, and a first planar source unit that provides a deposition material. The magnetic field can produce a plasma gas in the processing chamber, which enables the deposition material to be deposited on a substrate.
    Type: Application
    Filed: June 14, 2011
    Publication date: May 10, 2012
    Inventor: George X. Guo
  • Patent number: 8152975
    Abstract: A target assembly for material deposition includes a first target piece having a first sputtering surface and comprising a first target material that is to be sputtered off the first sputtering surface and to deposit on a substrate. The target assembly also includes a second target piece juxtaposed to the first target piece. The second target piece comprises a second sputtering surface and a second target material that can be sputtered off the second sputtering surface and to deposit on the substrate. The first target piece and the second target piece are configured to be switched in positions and/or orientations after a period of sputtering operations.
    Type: Grant
    Filed: March 30, 2007
    Date of Patent: April 10, 2012
    Assignee: Ascentool International
    Inventors: George X. Guo, Kai-an Wang
  • Publication number: 20120031755
    Abstract: A deposition system includes a chamber, a plurality of targets in a center region in the chamber and a plurality of substrates in the chamber. The targets are sequentially positioned when viewed in a first direction. At least one of the targets includes a sputtering surface facing outward. The substrates are sequentially positioned when viewed in the first direction. At least one of the substrates includes a deposition surface configured to receive material sputtered off the sputtering surface.
    Type: Application
    Filed: October 12, 2011
    Publication date: February 9, 2012
    Inventor: George X. Guo
  • Patent number: 8092601
    Abstract: A substrate processing system includes a source unit configured to supply a deposition material to a substrate, a substrate holder configured to hold a substrate to receive the deposition material, a shadow mask comprising a frame that includes two opposing arms; and a crossbar configured to be mounted to the two opposing arms. The frame and the crossbar define a plurality of openings that allow the deposition material supplied by the source unit to be deposited on the substrate. A transport mechanism can produce relative movement between the shadow mask and the substrate.
    Type: Grant
    Filed: December 9, 2007
    Date of Patent: January 10, 2012
    Assignee: Ascentool, Inc.
    Inventors: George X. Guo, Kai-an Wang
  • Publication number: 20110240461
    Abstract: A method for substrate processing includes producing a magnetic field by a magnetron across the full width of a sputtering surface of a target in a first direction. The magnetron can produce two erosion grooves separated by a distance S on the sputtering surface. The method includes moving the magnetron continuously at a first speed by the distance S in a first segment along a linear travel path. The linear travel path is along a second direction perpendicular to the first direction. The method includes continuously sputtering a material off the sputtering surface and depositing the material on the substrate during the first segment, and moving the magnetron by the distance S in a second segment along the linear travel path at a second speed higher than the first speed without sputtering the material off the sputtering surface or sputtering materials off at significant lower rate.
    Type: Application
    Filed: June 15, 2011
    Publication date: October 6, 2011
    Inventors: George X. Guo, Kai-an Wang
  • Publication number: 20110230010
    Abstract: A substrate processing system includes a source unit configured to supply a deposition material to a substrate, a substrate holder configured to hold a substrate to receive the deposition material, a shadow mask comprising a frame that includes two opposing arms; and a crossbar configured to be mounted to the two opposing arms. The frame and the crossbar define a plurality of openings that allow the deposition material supplied by the source unit to be deposited on the substrate. A transport mechanism can produce relative movement between the shadow mask and the substrate.
    Type: Application
    Filed: June 2, 2011
    Publication date: September 22, 2011
    Inventors: George X. Guo, Kai-an Wang
  • Patent number: 7806641
    Abstract: A substrate processing system includes a first load lock, a process chamber having a first opening to allow an exchange of a substrate between the first load lock and the first process chamber, first rollers in the process chamber; and second rollers in the first load lock, wherein the first rollers and the second rollers are configured to transport a substrate thereon through the first opening between the first load lock and the process chamber. The first rollers and the second rollers are not rotated by an active transport mechanism.
    Type: Grant
    Filed: August 30, 2007
    Date of Patent: October 5, 2010
    Assignee: Ascentool, Inc.
    Inventors: George X. Guo, Kai-an Wang
  • Patent number: 6039759
    Abstract: A prosthetic mechanical valve includes a base portion defining a through blood flow pathway closed by at least a pair of valve leaflets. The valve leaflets are pivotally carried by the base portion and movable in response to dynamic blood fluid pressures between a first position at which the leaflets close blood flow through the pathway and a second open position allowing blood flow in the pathway. A pair of confronting magnets are carried one to each of the pair of valve leaflets and attract one another. The magnetic forces of attraction between the pair of magnets imparts a biasing torque to the valve leaflets which tends to synchronize pivotal movements of the leaflets, cushions their sealing contact, quiets valve operation, and biases the leaflets toward a third partially open position. As a result, under conditions of nearly balanced blood fluid pressures across the pair of valve leaflet they anticipatorily open toward their third position to improve pumping effectiveness.
    Type: Grant
    Filed: July 23, 1998
    Date of Patent: March 21, 2000
    Assignee: Baxter International Inc.
    Inventors: Alain Carpentier, George X. Guo, Stefan G. Schreck
  • Patent number: 5861030
    Abstract: A bileaflet mechanical cardiovascular valve having a generally annular valve body and two occluder leaflets mounted within the valve body such that the occluder leaflets will move back and forth between an open configuration wherein blood is permitted to flow through the annular valve body and a closed configuration wherein blood is prevented from flowing in at least one direction through the annular valve body. Slots formed in opposite ends of the occluder leaflets are mounted upon raised mounting members formed on the inner surface of the annular valve body to facilitate the opening and closing movement of the occluder leaflets.
    Type: Grant
    Filed: March 21, 1997
    Date of Patent: January 19, 1999
    Assignee: Baxter International Inc.
    Inventors: Richard S. Rhee, George X. Guo, Seik Oh
  • Patent number: 5814100
    Abstract: A prosthetic mechanical valve includes a base portion defining a through blood flow pathway closed by at least a pair of valve leaflets. The valve leaflets are pivotally carried by the base portion and movable in response to dynamic blood fluid pressures between a first position at which the leaflets close blood flow through the pathway and a second open position allowing blood flow in the pathway. A pair of confronting magnets are carried one to each of the pair of valve leaflets and attract one another. The magnetic forces of attraction between the pair of magnets imparts a biasing torque to the valve leaflets which tends to synchronize pivotal movements of the leaflets, cushions their sealing contact, quiets valve operation, and biases the leaflets toward a third partially open position. As a result, under conditions of nearly balanced blood fluid pressures across the pair of valve leaflet they anticipatorily open toward their third position to improve pumping effectiveness.
    Type: Grant
    Filed: August 9, 1996
    Date of Patent: September 29, 1998
    Assignee: Baxter International Inc.
    Inventors: Alain Carpentier, George X. Guo, Stefan G. Schreck
  • Patent number: 5554186
    Abstract: A bileaflet mechanical cardiovascular valve comprising an annular valve body having a pair of occluder leaflets pivotally mounted therewithin. The occluder leaflets are pivotally mounted within the valve body by the snap-fitting of ear member which extend from the top and bottom ends of the occluder leaflets into corresponding cropped pivot slots formed within the annular valve body. Each cropped pivot slot comprises a spheroidal depression or recess having a first flat cropped edge and a second flat cropped edge. The ear members of the occluder leaflets are sized and configured relative to the cropped pivot slots to facilitate opening and closing of the occluder leaflets with minimal likelihood of hemolysis or thrombotic complications. Additionally disclosed is a specialized machine tool and method for machining the cropped pivot slots in the annular valve body.
    Type: Grant
    Filed: December 22, 1994
    Date of Patent: September 10, 1996
    Assignee: Baxter International Inc.
    Inventors: George X. Guo, Robert Stobie