Patents by Inventor Georgi A. Atanasov

Georgi A. Atanasov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical monitoring of thin films using fiber optics
    Patent number: 7345765
    Abstract: An optical monitoring system for monitoring thin film deposition on a substrate includes a support bridge that is attached on an inside of a deposition chamber. The system further includes a fiber optic collimator having an optical fiber for incoming light, and another fiber optic collimator having an optical fiber for transmitted or reflected light from the substrate. The system further includes a shutter that is closed when a desired thin film thickness is deposited on the substrate.
    Type: Grant
    Filed: March 11, 2005
    Date of Patent: March 18, 2008
    Inventor: Georgi A. Atanasov
  • Optical monitoring of thin film deposition
    Publication number: 20050162663
    Abstract: An optical monitoring system for monitoring thin film deposition on a substrate includes a support bridge that is attached on an inside of a deposition chamber. The system further includes a fiber optic collimator having an optical fiber for incoming light, and another fiber optic collimator having an optical fiber for transmitted or reflected light from the substrate. The system further includes a shutter that is closed when a desired thin film thickness is deposited on the substrate.
    Type: Application
    Filed: March 11, 2005
    Publication date: July 28, 2005
    Inventor: Georgi Atanasov
  • Optical monitoring of thin film deposition
    Patent number: 6879744
    Abstract: An optical monitoring system for monitoring thin film deposition on a substrate includes a support bridge that is attached on an inside of a deposition chamber. The system further includes a fiber optic collimator having an optical fiber for incoming light, and another fiber optic collimator having an optical fiber for transmitted or reflected light from the substrate. The system further includes a shutter that is closed when a desired thin film thickness is deposited on the substrate.
    Type: Grant
    Filed: July 28, 2003
    Date of Patent: April 12, 2005
    Inventor: Georgi A. Atanasov
  • Optical monitoring of thin film deposition
    Publication number: 20040131300
    Abstract: An optical monitoring system for monitoring thin film deposition on a substrate includes a support bridge that is attached on an inside of a deposition chamber. The system further includes a fiber optic collimator having an optical fiber for incoming light, and another fiber optic collimator having an optical fiber for transmitted or reflected light from the substrate. The system further includes a shutter that is closed when a desired thin film thickness is deposited on the substrate.
    Type: Application
    Filed: July 28, 2003
    Publication date: July 8, 2004
    Inventor: Georgi A. Atanasov