Patents by Inventor Georgi Popkirov

Georgi Popkirov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for etching semiconductors with a large surface area
    Patent number: 7208069
    Abstract: The device etches semiconductors with a large surface area in a trough-shaped receptacle containing a liquid electrolyte. A sample head is mounted inside the etching trough, and is provided with a device for holding at least one semiconductor wafer. The device is tilted to promote turbulent electrolyte flow in a space between a bottom surface of the semiconductor wafer and top surface of the trough-shaped receptacle.
    Type: Grant
    Filed: July 24, 2003
    Date of Patent: April 24, 2007
    Assignee: Kiel University
    Inventors: Marc Christophersen, Jörg Bahr, Jürgen Carstensen, Kay Steen, Georgi Popkirov, Helmut Föll
  • Device for etching semicnductors with a large surface area
    Publication number: 20050239292
    Abstract: The device etches semiconductors with a large surface area in a trough-shaped receptacle containing a liquid electrolyte. A sample head is mounted inside the etching trough, and is provided with a device for holding at least one semiconductor wafer. The device is tilted to promote turbulent electrolyte flow in a space between a bottom surface of the semiconductor wafer and top surface of the trough-shaped receptacle.
    Type: Application
    Filed: July 24, 2003
    Publication date: October 27, 2005
    Inventors: Marc Christophersen, Jorg Bahr, Jurgen Carstensen, Kay Steen, Georgi Popkirov, Helmut Foll