Abstract: The current disclosure relates to a method of depositing a metal halide-comprising material on a substrate by a cyclic deposition process. The method comprises providing a substrate in a reaction chamber, providing a metal precursor into the reaction chamber in a vapor phase and providing a halogen precursor into the reaction chamber in a vapor phase to form the metal halide-comprising material on the substrate. In the method, the metal precursor comprises a metal atom having an oxidation state of +1 bonded to an organic ligand. Also, a deposition assembly for depositing a metal halide-comprising material is disclosed.

Abstract: A floor grinding/polishing machine with a gimbal-mounted grinding/polishing head is disclosed. The floor grinding/polishing machine includes a wheeled carriage, a handle attached to the carriage for controlling the wheeled carriage, a grinding/polishing head attached to the wheeled carriage, and a motor supported on the grinding/polishing head for driving one or more abrasive discs on the bottom of the grinding/polishing head. The grinding/polishing head mounts to the wheeled carriage with a gimbal mount, allowing fore-and-aft pivoting of the head, as well as side-to-side pivoting of the head relative to the wheeled carriage.

Abstract: A grinding machine abrasive unit holder with the use of springs, gases or fluids allows each abrasive unit to be in contact with the floor, independently at all times. This action allows the finishing of the high and low spots of the floor in the same operation.