Patents by Inventor Georgia J. Fisanick

Georgia J. Fisanick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming metal regions
    Patent number: 5230970
    Abstract: A process of radiation-induced formation of a uniform metal or metal oxide region suitable for device application or for repairing transparent defects in pattern metal films of lithographic masks has been found. The process requires that the heat evolved during the radiation-induced reactions be carefully limited to produce the desired uniformity.
    Type: Grant
    Filed: May 28, 1992
    Date of Patent: July 27, 1993
    Assignee: AT&T Bell Laboratories
    Inventors: Donald K. Atwood, Georgia J. Fisanick, Michal E. Gross, Abraham Katzir, Gary L. Wolk
  • Method of repairing a defective photomask
    Patent number: 4636403
    Abstract: A process of laser-induced metal deposition for repairing transparent defects (18) in patterned metal films (14) of photomasks (10). The process comprises the steps of (a) coating the surface (16) of the substrate (12) having the film (14) thereon with a layer of metal-organic compound (50); (b) exposing the portions of the layer of metal-organic compound (50) overlying the defects (18) to a beam (24) of electromagnetic radiation from a laser (22); (c) ramping the power level of the radiation beam (24) delivered by the laser (22) until a metal patch (52) is reflective and adherent is formed; and (d) removing the unexposed portions of metal-organic compound (50) remaining on the substrate surface (16).
    Type: Grant
    Filed: April 29, 1985
    Date of Patent: January 13, 1987
    Assignees: AT&T Technologies, Inc., Bell Telephone Laboratories
    Inventors: Georgia J. Fisanick, Michal E. Gross, Gary L. Wolk