Patents by Inventor Georgina Shah

Georgina Shah has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for fabricating a thin film resistor semiconductor structure
    Patent number: 7669313
    Abstract: A method is provided of fabricating a thin film resistor semiconductor structure. In one aspect of the invention, the method includes forming a dielectric layer over a semiconductor substrate, forming a thin film resistor on the dielectric layer, and annealing the thin film resistor at a substantially high temperature for a predetermined time period to set the thermal coefficient of resistance of the thin film resistor. A passivation layer is formed over the semiconductor structure.
    Type: Grant
    Filed: July 11, 2005
    Date of Patent: March 2, 2010
    Assignee: Texas Instruments Incorporated
    Inventors: Joseph D. Fivas, Georgina Shah, Dianna L. Chandler
  • Method for fabricating a thin film resistor semiconductor structure
    Publication number: 20070008062
    Abstract: A method is provided of fabricating a thin film resistor semiconductor structure. In one aspect of the invention, the method includes forming a dielectric layer over a semiconductor substrate, forming a thin film resistor on the dielectric layer, and annealing the thin film resistor at a substantially high temperature for a predetermined time period to set the thermal coefficient of resistance of the thin film resistor. A passivation layer is formed over the semiconductor structure.
    Type: Application
    Filed: July 11, 2005
    Publication date: January 11, 2007
    Inventors: Joseph Fivas, Georgina Shah, Dianna Chandler