Patents by Inventor Georgy K. Vinogradov

Georgy K. Vinogradov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for plasma processing
    Patent number: 9137884
    Abstract: The present invention discloses an apparatus for plasma processing comprising of a chamber for plasma processing with an external wall, and at least one induction coil for providing a radio frequency induction field that is adjacent to the chamber. It further includes an end terminal of the induction coil that is connected to a radio frequency power supply, another end terminal of the induction coil that is open-ended, and a grounded terminal of the induction coil that is located at substantially central position of the induction coil.
    Type: Grant
    Filed: November 29, 2006
    Date of Patent: September 15, 2015
    Assignee: Lam Research Corporation
    Inventors: Georgy K. Vinogradov, Vladimir M. Menagarishvili
  • Induction coil, a plasma generator and a plasma generating method
    Patent number: 8247977
    Abstract: The plasma generator of our invention comprises of the induction coil which is symmetric with respect to the reference plane between two terminal ends. Plasma processing gas is supplied to a predetermined space, and high frequency electricity is supplied to the induction coil, thereby the plasma generator generates plasma in the space. The reference plane passes between the two terminal ends and through longitude axis of the induction coil. The plasma generator can generate plasma with high quality of homogeneous.
    Type: Grant
    Filed: July 24, 2009
    Date of Patent: August 21, 2012
    Assignee: Lam Research Corporation
    Inventors: Georgy K. Vinogradov, Vladimir M. Menagarishvili, Tetsuhiko Shimamura, Masayuki Nakamura
  • INDUCTION COIL, A PLASMA GENERATOR AND A PLASMA GENERATING METHOD
    Publication number: 20090278459
    Abstract: The plasma generator of our invention comprises of the induction coil which is symmetric with respect to the reference plane between two terminal ends. Plasma processing gas is supplied to a predetermined space, and high frequency electricity is supplied to the induction coil, thereby the plasma generator generates plasma in the space. The reference plane passes between the two terminal ends and through longitude axis of the induction coil. The plasma generator can generate plasma with high quality of homogeneous.
    Type: Application
    Filed: July 24, 2009
    Publication date: November 12, 2009
    Applicant: FOI CORPORATION
    Inventors: Georgy K. Vinogradov, Vladimir M. Menagarishvili, Tetsuhiko Shimamura, Masayuki Nakamura
  • Apparatus and method for plasma processing
    Publication number: 20080122367
    Abstract: The present invention discloses an apparatus for plasma processing comprising of a chamber for plasma processing with an external wall, and at least one induction coil for providing a radio frequency induction field that is adjacent to the chamber. It further includes an end terminal of the induction coil that is connected to a radio frequency power supply, another end terminal of the induction coil that is open-ended, and a grounded terminal of the induction coil that is located at substantially central position of the induction coil.
    Type: Application
    Filed: November 29, 2006
    Publication date: May 29, 2008
    Applicant: FOI Corporation
    Inventors: Georgy K. Vinogradov, Vladimir M. Menagarishvili
  • Process depending on plasma discharges sustained by inductive coupling
    Patent number: 6858112
    Abstract: A process for fabricating a product 28, 119. The process comprises the steps of subjecting a substrate to a composition of entities, at least one of the entities emanating from a species generated by a gaseous discharge excited by a high frequency field in which the vector sum of currents to phase and inverse-phase capacitive coupled voltages from the inductive coupling structure can be selectively maintained.
    Type: Grant
    Filed: November 18, 1996
    Date of Patent: February 22, 2005
    Assignee: Hitachi Kokusai Electric Co., Ltd.
    Inventors: Daniel L. Flamm, Georgy K. Vinogradov, Shimao Yoneyama