Patents by Inventor Ger-Wim Jan GOORHUIS

Ger-Wim Jan GOORHUIS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for cleaning an object
    Patent number: 10133196
    Abstract: An apparatus for cleaning an object, the apparatus including: an object support for supporting the object; a low pressure chamber for exposing a first surface of the object to a low pressure when the object is arranged on the object support, an electrode arranged adjacent to and separated from the first surface of the object when the object is arranged on the object support, the electrode being in electrical communication with a surface of the object support which is adjacent the first surface of the object; and a power supply arranged to apply a voltage between the electrode and the object; thereby generating a discharge between the object and the electrode.
    Type: Grant
    Filed: March 2, 2015
    Date of Patent: November 20, 2018
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Ronald Van Der Wilk, Ger-Wim Jan Goorhuis
  • APPARATUS FOR CLEANING AN OBJECT
    Publication number: 20170205717
    Abstract: An apparatus for cleaning an object, the apparatus including: an object support for supporting the object; a low pressure chamber for exposing a first surface of the object to a low pressure when the object is arranged on the object support, an electrode arranged adjacent to and separated from the first surface of the object when the object is arranged on the object support, the electrode being in electrical communication with a surface of the object support which is adjacent the first surface of the object; and a power supply arranged to apply a voltage between the electrode and the object; thereby generating a discharge between the object and the electrode.
    Type: Application
    Filed: March 2, 2015
    Publication date: July 20, 2017
    Applicant: ASML Netherlands B.V.
    Inventors: Ronald VAN DER WILK, Ger-Wim Jan GOORHUIS