Patents by Inventor Gerald A. Chabot

Gerald A. Chabot has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for installation of semiconductor fabrication tools
    Patent number: 7039999
    Abstract: This process for the installation of semiconductor fabrication tools includes designing standard modules for connecting the sources of the process gases and liquids t so that, for each gas and liquid, the sources of each required gas and liquid only need to be connected to the standard module once instead of multiple connections to the fabrication tool and support equipment. The modules can be installed before the delivery of the tool so that connection to the site sources of gases and liquids can be accomplished with fewer connections and in much shorter time.
    Type: Grant
    Filed: April 25, 2003
    Date of Patent: May 9, 2006
    Inventors: Adam L. Tarr, Gerald A. Chabot
  • Method for installation of semiconductor fabrication tools
    Publication number: 20030200638
    Abstract: This process for the installation of semiconductor fabrication tools includes designing standard modules for connecting the sources of the process gases and liquids t so that, for each gas and liquid, the sources of each required gas and liquid only need to be connected to the standard module once instead of multiple connections to the fabrication tool and support equipment. The modules can be installed before the delivery of the tool so that connection to the site sources of gases and liquids can be accomplished with fewer connections and in much shorter time.
    Type: Application
    Filed: April 25, 2003
    Publication date: October 30, 2003
    Inventors: Adam L. Tarr, Gerald A. Chabot