Abstract: An ellipsometry cell is provided with a transparent lid that is positioned close to a specimen within the cell, thus allowing for a low volume wet chemical treatment of the specimen, and yet prevents interference with the ellipsometry measurements by partial reflections of a probe beam off the outer and inner lid surfaces. This is accomplished by configuring the lid to direct an ellipsometry beam and reflections thereof at different angles, so that the beam but not its reflections enter an ellipsometer analyzer. The lid preferably has an angled outer surface with beam entry and exit windows symmetrically tapering from a central ridge, and its inner surface substantially flat and parallel to the cell base.

Abstract: A supply valve includes a first valve member formed with a plurality of ports which communicate with containers of different fluids, and a second valve member having a single port which communicates with an inlet of a chamber into which the fluids are selectively supplied. The second valve member sealingly and slidingly engages with the first valve member, and is movable by a computer-controlled motor drive relative thereto in two directions to positions in which the port of the second valve member communicates with the ports of the first valve member respectively. Each position has unique coordinates in the two directions such that the fluids can be selected in any sequence. In one embodiment, the first valve member is a cylinder having a bore with an axis and the second valve member is a piston which is coaxially received in the bore, and the two directions are rotation above the axis and translation along the axis respectively.

Abstract: A semiconductor wafer (52) or other object is retained in a cell (50) such that a thin space (60) having a laterally spaced inlet (62) and outlet (64) is provided above the wafer surface (52a). A plurality of chemicals including solvents, etchants, etc. are provided in individual pressurized containers (18,20,22,24,28,44). A valve (42) connects a selected container (18,20,22,24,28,44) to the inlet (62) for a length of time sufficient for the respective chemical to fill the space (60), and also connects the outlet (64) to an individual receptacle (26,30) for the chemical. The valve (42) then disconnects the container (18,20,22,24,28,44) and receptacle (26,30) from the inlet (62) and outlet (64) and traps the chemical in the space (60) for a length of time sufficient for the chemical to react with the wafer surface (52a).