Patents by Inventor Gerald Allan Coquin

Gerald Allan Coquin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mask structures for X-ray lithography
    Patent number: 4037111
    Abstract: It has been observed that the deposition and patterning of metallic layers on a supported X-ray-transparent film to form a mask for X-ray lithography introduce stresses in the mask structure. In turn these stresses cause distortions of the film and of the high-resolution X-ray-absorptive pattern formed thereon. Various techniques, including new metallization systems, are proposed for minimizing the establishment of stresses in such structures.
    Type: Grant
    Filed: June 8, 1976
    Date of Patent: July 19, 1977
    Assignee: Bell Telephone Laboratories, Incorporated
    Inventors: Gerald Allan Coquin, Juan Ramon Maldonado, Dan Maydan, Sasson Roger Somekh