Abstract: A boat carrier for accommodating multiple width integrated circuit (IC) boats is provided. The boat carrier comprises a base member and opposed guide faces which abut side surfaces of IC boats of multiple widths. In a first embodiment, the boat carrier includes a first guide having a first guide face affixed to the base member, and a movable guide having a movable guide face releasably affixed to the base member. The movable guide face has a first position and a second position, whereby a narrower IC boat is receivable in the first position and a wider IC boat is receivable in the second position. In a further embodiment, the boat carrier comprises a base member, a fixed guide assembly having a fixed guide face, and an opposed guide assembly having an inner and outer guide face, whereby a boat having a first or second width is receivable.

Abstract: A vapor processing system which has a vessel for containing a processing vapor generated by heating electronic fluid contained within the vessel. A selected saturated vapor zone level is devined for work product delivered to the vapor zone by generating a signal representative of the actual temperature at one of a plurality of spaced locations within the vessel, generating a signal representative of the desired temperature at the selected location for a saturated vapor zone having a level selected for the work product being conveyed to the saturated vapor zone, and comparing the signals representative of the actual and desired temperatures at the selected location and for varying the output of the heater to change the actual sensed temperature to the desired temperature so that the actual saturated vapor zone level will conform to the desired saturated vapor zone level.

Abstract: A vapor processing system which has a vessel for containing a processing vapor generated by heating an electronic fluid contained within the vessel.

Abstract: A steam turbine is provided with an electrohydraulic control system having an automatic control which includes a digital computer and further having a manual backup control for operating the turbine on automatic or operator switchover to backup control. The automatic control includes control elements and logic elements associated with valve control loops coupled to the turbine and high and low limits and other constants, setpoints and other parameters are characteristic to these control and logic elements and the interrelations among them and the turbine. A switch arrangement is provided for generating parameter value signals corresponding to changed values for the system parameters and for coupling the parameter value signals to the automatic control system where they are registered. The automatic control system is structured to reject invalid parameter value changes and to register only those parameter value changes which can be validly entered as part of the system structure.

Abstract: In a system and method for automatically starting, synchronizing and operating a steam turbine, turbine control including valve position limiting and means for generating a reference control signal representative of desired turbine operation, the reference control signal being limited corresponding to the valve position limit. The reference signal is limited by calculated valve position limits, such that the reference signal is not permitted to rise above such limits. Desired system changes result in reference signal changes which are more quickly reflected in valve position changes, thereby enabling improved system response.