Abstract: A securing device for a sputtering source in a sputtering space includes a current transmitting means (2, 10, 13, 15, 16, 17, 18) of electrically and thermally conductive material for the conducting of a current to the sputtering source and also a screening means (1, 4, 5, 6, 12) for the screening of the current transmitting means from the sputtering space, so that the current transmitting means can be electrically insulated from the sputtering space, characterised in that temperature resistant means (1, 5) are provided to guarantee a temperature resistance and a resistance to electrical discharges of the securing device, in particular at temperatures up to 1150° C.

Abstract: A target for a sputtering source can be subdivided into a plurality of exchangeable target segments (9). Each target segment (9) contains coating material, wherein each target segment (9) borders on at least two adjacent target segments (9?, 9?), wherein each target segment is connectable to a base body (2, 13, 15) by means of at most one securing means (7, 8, 10).

Abstract: An apparatus for the attachment of a target or target segment (9) of a coating source includes a target or target segment (9) and a target holder (1) which includes a cooling body (3) and connecting means (6,7,8,11) for the attachment of the target or target segment to the cooling body. The connecting means include (3,6,7,8,10,11) electrically and/or thermally conductive means, so that the power supply takes place in a uniform distribution across the target or target segment, and also the heat arising at the target or target segment during the coating method can be uniformly conducted away into the cooling body, by which means more power can be coupled into the coating source and the coating rate is raised.