Abstract: An automated material handling system that includes an extractor/buffer apparatus capable of simultaneously accessing multiple Work-In-Process (WIP) parts, thereby providing a highly efficient interface between WIP storage locations and transport equipment. The extractor/buffer apparatus includes multiple extractor/buffer modules, each module being configured to interface with a location for holding WIP parts that is a number of WIP parts deep. Each module includes a platform for holding multiple WIP parts. Further, multiple modules may be disposed side-by-side to form an extractor/buffer apparatus capable of handling multiple rows of WIP parts.

Abstract: An exemplary embodiment a substrate transport system is provided. The system has a guideway and at least one transport vehicle. The transport vehicle is adapted for holding at least one substrate and capable of being supported from and moving along the guideway. The guideway comprises at least one travel lane for the vehicle and at least one access lane offset from the travel lane allowing the vehicle selectable access on and off the travel lane.

Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier at the load port interface. The carrier holding station is arranged to provide a fast swap section for replacement of the substrate transport carrier from the carrier holding station.

Abstract: A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.

Abstract: An automated material handling system that includes an extractor/buffer apparatus capable of simultaneously accessing multiple Work-In-Process (WIP) parts, thereby providing a highly efficient interface between WIP storage locations and transport equipment. The extractor/buffer apparatus includes multiple extractor/buffer modules, each module being configured to interface with a location for holding WIP parts that is a number of WIP parts deep. Each module includes a platform for holding multiple WIP parts. Further, multiple modules may be disposed side-by-side to form an extractor/buffer apparatus capable of handling multiple rows of WIP parts.

Abstract: A semiconductor workpiece processing system comprising at least one processing tool, a container, a first transport section, and a second transport section. The processing tool is used for processing semiconductor workpieces. The container is used for holding at least one semiconductor workpiece therein for transporting two and from the processing tool. The first transport section is connected to the processing tool for transporting the container to and from the processing tool. The second transport section is connected to the first transport section for transporting the container to and from the processing tool. The first transport section is vehicle based having a transport vehicle capable of holding the container and moving along a first track of the first transport section.

Abstract: In forming an article, such as a turbine blade, of metal powder, a container is first formed by electroplating a thin layer of metal over a pattern having a configuration which corresponds to the configuration of the article. The pattern is then removed to leave a container having a cavity with a configuration corresponding to the configuration of the article. The container is filled with metal powder and sealed. The container is then at least partially enclosed with a rigid body of fluid permeable material having inner side surface areas disposed in abutting engagement with the container. Heat and fluid pressure are transmitted through the rigid body to compact the container and metal powder. The fluid pressure causes the side walls of the container to move away from the inner side surfaces of the rigid body of fluid permeable material.

Abstract: A method of bonding and shaping a plurality of pieces of material disposed in a fluid tight container includes providing a housing having components with different coefficients of thermal expansion. The container is positioned between upper and lower sections of the housing. The housing is then enclosed in an autoclave. The fluid in the autoclave and housing is heated with a resulting increase in the fluid pressure in the autoclave and housing. As the temperature and pressure in the housing is increased, the joint between the container and the housing sections is sealed by pressing the upper and lower sections of the housing against the container under the influence of forces resulting from different amounts of of thermal expansion of components of the housing. Thereafter, the fluid pressure in the autoclave is increased. Since the joint between the housing and the container has been sealed, the further increase in fluid pressure is applied to only the upper side of the container.