Patents by Inventor Gerald M. Karl

Gerald M. Karl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Spin drying apparatus
    Patent number: 4651440
    Abstract: A spin drying apparatus for drying semiconductor wafers wherein the wafers are contacted only at the edge thereof by a plurality of radially extending arms and wherein means is provided for preventing the generation of turbulent air flow by the fan-like effect of the rotation of the arms during the spin drying step and the recontamination of already cleaned and dried wafer surfaces by contaminants stirred up by the operation of the spin drying apparatus itself.
    Type: Grant
    Filed: May 16, 1986
    Date of Patent: March 24, 1987
    Assignee: Eastman Kodak Company
    Inventor: Gerald M. Karl