Patents by Inventor Gerald Schoenecker

Gerald Schoenecker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron beam device with dispersion compensation, and method of operating same
    Patent number: 9048068
    Abstract: An electron beam device comprises: a beam emitter for emitting a primary electron beam; an objective electron lens for focusing the primary electron beam onto a specimen, the objective lens defining an optical axis; a beam separator having a first dispersion for separating a signal electron beam from the primary electron beam; and a dispersion compensation element. The dispersion compensation element has a second dispersion, the dispersion compensation element being adapted for adjusting the second dispersion independently of an inclination angle of the primary beam downstream of the dispersion compensation element, such that the second dispersion substantially compensates the first dispersion. The dispersion compensation element is arranged upstream, along the primary electron beam, of the beam separator.
    Type: Grant
    Filed: May 10, 2010
    Date of Patent: June 2, 2015
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik GmbH
    Inventors: Stefan Lanio, Gerald Schoenecker
  • Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator
    Patent number: 8373136
    Abstract: An achromatic beam separator device for separating a primary charged particle beam from another charged particle beam and providing the primary charged particle beam on an optical axis (142) is provided, including a primary charged particle beam inlet (134), a primary charged particle beam outlet (132) encompassing the optical axis, a magnetic deflection element (163) adapted to generate a magnetic field, and an electrostatic deflection element (165) adapted to generate an electric field overlapping the magnetic field, wherein at least one element chosen from the electrostatic deflection element and the magnetic deflection element is positioned and/or positionable to compensate an octopole influence.
    Type: Grant
    Filed: October 15, 2009
    Date of Patent: February 12, 2013
    Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
    Inventors: Gerald Schoenecker, Stefan Lanio
  • High current density particle beam system
    Patent number: 7335894
    Abstract: The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.
    Type: Grant
    Filed: November 15, 2005
    Date of Patent: February 26, 2008
    Assignee: ICT Integrated Circuit Testing Gesselschaft
    Inventors: Juergen Frosien, Stefan Lanio, Gerald Schoenecker, Alan D. Brodie, David A. Crewe
  • High current density particle beam system
    Publication number: 20060151711
    Abstract: The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.
    Type: Application
    Filed: November 15, 2005
    Publication date: July 13, 2006
    Inventors: Juergen Frosien, Stefan Lanio, Gerald Schoenecker, Alan Brodie, Davis Crewe
  • Electron beam generator
    Patent number: 4980558
    Abstract: An electron beam generator or electron gun has a line-shaped cathode with a flattened tip as an electron source, a slotted diaphragm disposed in the plane of the cathode tip, and a double anode having two electrodes also fashioned as slotted diaphragms. The voltage potentials of the three slotted diaphragms, and their respective distances to the cathode, are selected such that a stigmatic virtual electron source at infinity is obtained.
    Type: Grant
    Filed: July 13, 1989
    Date of Patent: December 25, 1990
    Assignee: Siemens Aktiengesellschaft
    Inventors: Harald Rose, Gerald Schoenecker