Patents by Inventor Gerald Wonnacott

Gerald Wonnacott has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluorine plasma oxidation of residual sulfur species
    Patent number: 4501061
    Abstract: A method for stripping an organic photoresist layer from a semiconductor device comprises oxidation of the photoresist layer with oxygen plasma and subsequent removal of residual sulfur species using a fluorine-containing plasma.
    Type: Grant
    Filed: May 31, 1983
    Date of Patent: February 26, 1985
    Assignee: Advanced Micro Devices, Inc.
    Inventor: Gerald Wonnacott