Patents by Inventor Gerard H. Vurens
Gerard H. Vurens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20180338702Abstract: Technologies are generally described to detect hydration using a shielded ring resonator structure. In some examples, a shielded ring resonator structure configured to be attached to a subject for hydration detection may include a ring resonator, one or more feed structures that couple signals into and out of the ring resonator, and a conductive shield structure that covers gaps between the ring resonator and the feed structure(s). The shield structure may be disposed between the gaps and the subject to reduce capacitive coupling between the gaps and the subject, thereby reducing current flow between the subject and the ring resonator and/or feed structure(s).Type: ApplicationFiled: May 26, 2017Publication date: November 29, 2018Applicant: EMPIRE TECHNOLOGY DEVELOPMENT LLCInventors: Anthony J. Tagliaferro, Michael J. Schirle, Udai Singh, John L. Unkovic, Gerard H. Vurens
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Patent number: 7206066Abstract: There is described an improved Surface Reflectance Instrument which achieves more complete detection of surface defects in the nature of small particles. One of the improvements is the use of an elliptical integrated cavity with internal surface mirrors, and another the use of a position sensing diode as the detector for the scattered light. Other improvements and the use of a stable laser at a particular wavelength resulting in greater detection are also described.Type: GrantFiled: March 19, 2004Date of Patent: April 17, 2007Assignee: KLA-Tencor Technologies CorporationInventors: Gerard H. Vurens, Kasra Khazeni
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Patent number: 6678043Abstract: There is described method and apparatus to create multi-dimensional non-spatial histograms of surfaces and to compare such histograms to show whether the surfaces substantially conform to one another. This analysis is particularly applicable to comparing die on wafers to determine whether manufactured devices conform to a master or whether one die is like another.Type: GrantFiled: October 31, 2000Date of Patent: January 13, 2004Inventors: Gerard H. Vurens, David L. Klein
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Patent number: 6515745Abstract: An optical measurement system for evaluating the surface of a substrate or the thickness and optical characteristics of a thin film layer overlying the substrate includes a light source for generating a light beam, a static polarizing element for polarizing the light beam emanating from the light source, and a measurement system for measuring the light reflected from the substrate location. The measurement system includes a static beam splitting element for splitting the light reflected from the substrate into s-polarized light and p-polarized light. The measurement system further includes two optical sensors for separately measuring the amplitude of the s-polarized light and the intensity of the p-polarized light. A control system analyzes the measured amplitude of the s-polarized light and the p-polarized to determine changes in the topography of substrate or changes in the thickness or optical characteristics of the thin film layer.Type: GrantFiled: October 19, 2001Date of Patent: February 4, 2003Assignee: HDI InstrumentationInventors: Gerard H. Vurens, David L. Klein
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Publication number: 20020054290Abstract: An optical measurement system for evaluating the surface of a substrate or the thickness and optical characteristics of a thin film layer overlying the substrate includes a light source for generating a light beam, a static polarizing element for polarizing the light beam emanating from the light source, and a measurement system for measuring the light reflected from the substrate location. The measurement system includes a static beam splitting element for splitting the light reflected from the substrate into s-polarized light and p-polarized light. The measurement system further includes two optical sensors for separately measuring the amplitude of the s-polarized light and the intensity of the p-polarized light. A control system analyzes the measured amplitude of the s-polarized light and the p-polarized to determine changes in the topography of substrate or changes in the thickness or optical characteristics of the thin film layer.Type: ApplicationFiled: October 19, 2001Publication date: May 9, 2002Inventors: Gerard H. Vurens, David L. Klein
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Patent number: 6307627Abstract: An optical measurement system for evaluating the surface of a substrate or the thickness and optical characteristics of a thin film layer overlying the substrate includes a light source for generating a light beam, a static polarizing element for polarizing the light beam emanating from the light source, and a measurement system for measuring the light reflected from the substrate location. The measurement system includes a static beam splitting element for splitting the light reflected from the substrate into s-polarized light and p-polarized light. The measurement system further includes two optical sensors for separately measuring the amplitude of the s-polarized light and the intensity of the p-polarized light. A control system analyzes the measured amplitude of the s-polarized light and the p-polarized to determine changes in the topography of substrate or changes in the thickness or optical characteristics of the thin film layer.Type: GrantFiled: November 16, 1999Date of Patent: October 23, 2001Assignee: HDI InstrumentationInventor: Gerard H. Vurens
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Patent number: 6134011Abstract: An optical measurement system for evaluating the surface of a substrate or the thickness and optical characteristics of a thin film layer overlying the substrate includes an intensity stabilized light source configured to generate a stabilized light beam, a polarizing element for polarizing the light beam emanating from the light source, and a detection system for measuring the light reflected from the substrate The measurement system includes a polarizing beam-splitter for splitting the light reflected from the substrate into s-polarized light and p-polarized light. The measurement system further includes two optical sensors for separately measuring the amplitude of the s-polarized light and the intensity of the p-polarized light and a third detector for measuring either the phase difference between the s-polarized light and the p-polarized light or the reflection angle of the light reflected from the substrate.Type: GrantFiled: September 15, 1998Date of Patent: October 17, 2000Assignee: HDI InstrumentationInventors: David L. Klein, Gerard H. Vurens
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Patent number: 5898181Abstract: A method and apparatus for inspecting a reflective surface, or material on such surface, such as lubricant and planarizing layers on a substrate surface. A beam of controlled polarization impinges obliquely at a spot in the plane of the substrate. A collector such as an integrating sphere is spaced away from the substrate and has an opening oriented to catch the oblique specular reflectance from the surface. Preferably the opening is substantially larger than the beam, so that substrate run out does not send the beam astray or defeat its measurement, and the oblique beam is aimed at an angle lying between the Brewster angle of the lubricant and that of the adjacent layer. A temperature-controlled laser diode with constant-current driver provides a beam that is free of wavelength hops and amplitude changes, making beam aiming repeatable and allowing point-by-point comparisons of the detected reflectance.Type: GrantFiled: September 22, 1997Date of Patent: April 27, 1999Assignee: HDI InstrumentationInventor: Gerard H. Vurens
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Patent number: 5726455Abstract: A method and apparatus for inspecting a reflective surface, or material on such surface, such as lubricant and planarizing layers on a magnetic media storage disk. A beam of controlled polarization impinges obliquely at a spot in the plane of the disk. A collector such as an integrating sphere is spaced away from the disk and has an opening oriented to catch the oblique specular reflectance from the surface. Preferably the opening is substantially larger than the beam, so that disk run out does not send the beam astray or defeat its measurement, and the oblique beam is aimed at an angle lying between the Brewster angle of the lubricant and that of the adjacent layer. A temperature-controlled laser diode with constant-current driver provides a beam that is free of wavelength hops and amplitude changes, making beam aiming repeatable and allowing point-by-point comparisons of the detected reflectance.Type: GrantFiled: May 1, 1996Date of Patent: March 10, 1998Assignee: StorMedia, Inc.Inventor: Gerard H. Vurens
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Patent number: 5718942Abstract: A composite lubricant for thin-film magnetic discs comprising perfluoropolyether (PFPE) lubricant and an anti-oxidant, cyclophosphazene lubricant dispersed in a fluoropentane solvent.Type: GrantFiled: June 28, 1996Date of Patent: February 17, 1998Assignee: StorMedia, Inc.Inventors: Gerard H. Vurens, Hamid R. Samani, Yassin Mehmandoust, Atef H. Eltoukhy
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Patent number: 5631081Abstract: The present invention is a method for bonding a lubricant onto the surface of rotating storage media. In particular, the method bonds reactive and non-reactive lubricants onto the carbon based protective coating of a magnetic storage disk. The lubricant is first applied onto the disk surface through conventional coating techniques, such as dipping, spinning, spraying, or vapor deposition. The thickness of the applied coating is thicker than the final bonded thickness of the lubricant. Typically, the applied thickness of the film is approximately 30 Angstroms. The lubricant coated disk surface is then exposed to low energy electron irradiation. The energy level of the accelerated electrons is below 100 eV. The lubricated film is exposed to a dosage level of approximately 1000 microcoulombs per square centimeter. This dosage level bonds approximately 15 Angstroms of lubricant to the disk surface. The non-bonded or excess lubricant is then rinsed off in a liquid freon or other suitable rinse.Type: GrantFiled: November 18, 1994Date of Patent: May 20, 1997Assignee: International Business Machines CorporationInventors: Li-Ju J. Lin, John S. Foster, Christopher S. Gudeman, Gerard H. Vurens
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Patent number: 5586040Abstract: Controlled laser texturing of a magnetic recording disk is accomplished by use of a textured test band on the disk and an analyzing laser system to provide feedback to the texturing laser. The analyzing laser system determines, from diffracted laser light, the average height of the laser-induced bumps formed in the test band by the texturing laser. The analyzing laser beam is directed to the substrate surface and overlaps a group of individual bumps formed in a repetitive pattern. A scanning linear photodector array receives light diffracted from the surface. The digitized output of the array is the angular distribution of diffracted light intensities and is used to compute the average height of the bumps in the test band. The disk is then translated radially so that the texturing laser is aligned with the region of the disk where the textured landing zone is to be placed.Type: GrantFiled: April 11, 1995Date of Patent: December 17, 1996Assignee: International Business Machines CorporationInventors: Peter M. Baumgart, Christopher S. Gudeman, Douglas J. Krajnovich, Steven W. Meeks, Thao A. Nguyen, Fior D. Sargent, Andrew C. Tam, Gerard H. Vurens
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Patent number: 5545478Abstract: The present invention is a method for bonding a lubricant onto the surface of rotating storage media. In particular, the method bonds reactive and non-reactive lubricants onto the carbon based protective coating of a magnetic storage disk. The lubricant is first applied onto the disk surface through conventional coating techniques, such as dipping, spinning, spraying, or vapor deposition. The thickness of the applied coating is thicker than the final bonded thickness of the lubricant. Typically, the applied thickness of the film is approximately 30 Angstroms. The lubricant coated disk surface is then exposed to low energy electron irradiation. The energy level of the accelerated electrons is below 100 eV. The lubricated film is exposed to a dosage level of approximately 1000 microcoulombs per square centimeter. This dosage level bonds approximately 15 Angstroms of lubricant to the disk surface. The non-bonded or excess lubricant is then rinsed off in a liquid freon or other suitable rinse.Type: GrantFiled: June 6, 1994Date of Patent: August 13, 1996Assignee: International Business Machine CorporationInventors: Li-Ju J. Lin, John S. Foster, Christopher S. Gudeman, Gerard H. Vurens