Patents by Inventor Gerard H. Vurens

Gerard H. Vurens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180338702
    Abstract: Technologies are generally described to detect hydration using a shielded ring resonator structure. In some examples, a shielded ring resonator structure configured to be attached to a subject for hydration detection may include a ring resonator, one or more feed structures that couple signals into and out of the ring resonator, and a conductive shield structure that covers gaps between the ring resonator and the feed structure(s). The shield structure may be disposed between the gaps and the subject to reduce capacitive coupling between the gaps and the subject, thereby reducing current flow between the subject and the ring resonator and/or feed structure(s).
    Type: Application
    Filed: May 26, 2017
    Publication date: November 29, 2018
    Applicant: EMPIRE TECHNOLOGY DEVELOPMENT LLC
    Inventors: Anthony J. Tagliaferro, Michael J. Schirle, Udai Singh, John L. Unkovic, Gerard H. Vurens
  • Patent number: 7206066
    Abstract: There is described an improved Surface Reflectance Instrument which achieves more complete detection of surface defects in the nature of small particles. One of the improvements is the use of an elliptical integrated cavity with internal surface mirrors, and another the use of a position sensing diode as the detector for the scattered light. Other improvements and the use of a stable laser at a particular wavelength resulting in greater detection are also described.
    Type: Grant
    Filed: March 19, 2004
    Date of Patent: April 17, 2007
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Gerard H. Vurens, Kasra Khazeni
  • Patent number: 6678043
    Abstract: There is described method and apparatus to create multi-dimensional non-spatial histograms of surfaces and to compare such histograms to show whether the surfaces substantially conform to one another. This analysis is particularly applicable to comparing die on wafers to determine whether manufactured devices conform to a master or whether one die is like another.
    Type: Grant
    Filed: October 31, 2000
    Date of Patent: January 13, 2004
    Inventors: Gerard H. Vurens, David L. Klein
  • Patent number: 6515745
    Abstract: An optical measurement system for evaluating the surface of a substrate or the thickness and optical characteristics of a thin film layer overlying the substrate includes a light source for generating a light beam, a static polarizing element for polarizing the light beam emanating from the light source, and a measurement system for measuring the light reflected from the substrate location. The measurement system includes a static beam splitting element for splitting the light reflected from the substrate into s-polarized light and p-polarized light. The measurement system further includes two optical sensors for separately measuring the amplitude of the s-polarized light and the intensity of the p-polarized light. A control system analyzes the measured amplitude of the s-polarized light and the p-polarized to determine changes in the topography of substrate or changes in the thickness or optical characteristics of the thin film layer.
    Type: Grant
    Filed: October 19, 2001
    Date of Patent: February 4, 2003
    Assignee: HDI Instrumentation
    Inventors: Gerard H. Vurens, David L. Klein
  • Publication number: 20020054290
    Abstract: An optical measurement system for evaluating the surface of a substrate or the thickness and optical characteristics of a thin film layer overlying the substrate includes a light source for generating a light beam, a static polarizing element for polarizing the light beam emanating from the light source, and a measurement system for measuring the light reflected from the substrate location. The measurement system includes a static beam splitting element for splitting the light reflected from the substrate into s-polarized light and p-polarized light. The measurement system further includes two optical sensors for separately measuring the amplitude of the s-polarized light and the intensity of the p-polarized light. A control system analyzes the measured amplitude of the s-polarized light and the p-polarized to determine changes in the topography of substrate or changes in the thickness or optical characteristics of the thin film layer.
    Type: Application
    Filed: October 19, 2001
    Publication date: May 9, 2002
    Inventors: Gerard H. Vurens, David L. Klein
  • Patent number: 6307627
    Abstract: An optical measurement system for evaluating the surface of a substrate or the thickness and optical characteristics of a thin film layer overlying the substrate includes a light source for generating a light beam, a static polarizing element for polarizing the light beam emanating from the light source, and a measurement system for measuring the light reflected from the substrate location. The measurement system includes a static beam splitting element for splitting the light reflected from the substrate into s-polarized light and p-polarized light. The measurement system further includes two optical sensors for separately measuring the amplitude of the s-polarized light and the intensity of the p-polarized light. A control system analyzes the measured amplitude of the s-polarized light and the p-polarized to determine changes in the topography of substrate or changes in the thickness or optical characteristics of the thin film layer.
    Type: Grant
    Filed: November 16, 1999
    Date of Patent: October 23, 2001
    Assignee: HDI Instrumentation
    Inventor: Gerard H. Vurens
  • Patent number: 6134011
    Abstract: An optical measurement system for evaluating the surface of a substrate or the thickness and optical characteristics of a thin film layer overlying the substrate includes an intensity stabilized light source configured to generate a stabilized light beam, a polarizing element for polarizing the light beam emanating from the light source, and a detection system for measuring the light reflected from the substrate The measurement system includes a polarizing beam-splitter for splitting the light reflected from the substrate into s-polarized light and p-polarized light. The measurement system further includes two optical sensors for separately measuring the amplitude of the s-polarized light and the intensity of the p-polarized light and a third detector for measuring either the phase difference between the s-polarized light and the p-polarized light or the reflection angle of the light reflected from the substrate.
    Type: Grant
    Filed: September 15, 1998
    Date of Patent: October 17, 2000
    Assignee: HDI Instrumentation
    Inventors: David L. Klein, Gerard H. Vurens
  • Patent number: 5898181
    Abstract: A method and apparatus for inspecting a reflective surface, or material on such surface, such as lubricant and planarizing layers on a substrate surface. A beam of controlled polarization impinges obliquely at a spot in the plane of the substrate. A collector such as an integrating sphere is spaced away from the substrate and has an opening oriented to catch the oblique specular reflectance from the surface. Preferably the opening is substantially larger than the beam, so that substrate run out does not send the beam astray or defeat its measurement, and the oblique beam is aimed at an angle lying between the Brewster angle of the lubricant and that of the adjacent layer. A temperature-controlled laser diode with constant-current driver provides a beam that is free of wavelength hops and amplitude changes, making beam aiming repeatable and allowing point-by-point comparisons of the detected reflectance.
    Type: Grant
    Filed: September 22, 1997
    Date of Patent: April 27, 1999
    Assignee: HDI Instrumentation
    Inventor: Gerard H. Vurens
  • Patent number: 5726455
    Abstract: A method and apparatus for inspecting a reflective surface, or material on such surface, such as lubricant and planarizing layers on a magnetic media storage disk. A beam of controlled polarization impinges obliquely at a spot in the plane of the disk. A collector such as an integrating sphere is spaced away from the disk and has an opening oriented to catch the oblique specular reflectance from the surface. Preferably the opening is substantially larger than the beam, so that disk run out does not send the beam astray or defeat its measurement, and the oblique beam is aimed at an angle lying between the Brewster angle of the lubricant and that of the adjacent layer. A temperature-controlled laser diode with constant-current driver provides a beam that is free of wavelength hops and amplitude changes, making beam aiming repeatable and allowing point-by-point comparisons of the detected reflectance.
    Type: Grant
    Filed: May 1, 1996
    Date of Patent: March 10, 1998
    Assignee: StorMedia, Inc.
    Inventor: Gerard H. Vurens
  • Patent number: 5718942
    Abstract: A composite lubricant for thin-film magnetic discs comprising perfluoropolyether (PFPE) lubricant and an anti-oxidant, cyclophosphazene lubricant dispersed in a fluoropentane solvent.
    Type: Grant
    Filed: June 28, 1996
    Date of Patent: February 17, 1998
    Assignee: StorMedia, Inc.
    Inventors: Gerard H. Vurens, Hamid R. Samani, Yassin Mehmandoust, Atef H. Eltoukhy
  • Patent number: 5631081
    Abstract: The present invention is a method for bonding a lubricant onto the surface of rotating storage media. In particular, the method bonds reactive and non-reactive lubricants onto the carbon based protective coating of a magnetic storage disk. The lubricant is first applied onto the disk surface through conventional coating techniques, such as dipping, spinning, spraying, or vapor deposition. The thickness of the applied coating is thicker than the final bonded thickness of the lubricant. Typically, the applied thickness of the film is approximately 30 Angstroms. The lubricant coated disk surface is then exposed to low energy electron irradiation. The energy level of the accelerated electrons is below 100 eV. The lubricated film is exposed to a dosage level of approximately 1000 microcoulombs per square centimeter. This dosage level bonds approximately 15 Angstroms of lubricant to the disk surface. The non-bonded or excess lubricant is then rinsed off in a liquid freon or other suitable rinse.
    Type: Grant
    Filed: November 18, 1994
    Date of Patent: May 20, 1997
    Assignee: International Business Machines Corporation
    Inventors: Li-Ju J. Lin, John S. Foster, Christopher S. Gudeman, Gerard H. Vurens
  • Patent number: 5586040
    Abstract: Controlled laser texturing of a magnetic recording disk is accomplished by use of a textured test band on the disk and an analyzing laser system to provide feedback to the texturing laser. The analyzing laser system determines, from diffracted laser light, the average height of the laser-induced bumps formed in the test band by the texturing laser. The analyzing laser beam is directed to the substrate surface and overlaps a group of individual bumps formed in a repetitive pattern. A scanning linear photodector array receives light diffracted from the surface. The digitized output of the array is the angular distribution of diffracted light intensities and is used to compute the average height of the bumps in the test band. The disk is then translated radially so that the texturing laser is aligned with the region of the disk where the textured landing zone is to be placed.
    Type: Grant
    Filed: April 11, 1995
    Date of Patent: December 17, 1996
    Assignee: International Business Machines Corporation
    Inventors: Peter M. Baumgart, Christopher S. Gudeman, Douglas J. Krajnovich, Steven W. Meeks, Thao A. Nguyen, Fior D. Sargent, Andrew C. Tam, Gerard H. Vurens
  • Patent number: 5545478
    Abstract: The present invention is a method for bonding a lubricant onto the surface of rotating storage media. In particular, the method bonds reactive and non-reactive lubricants onto the carbon based protective coating of a magnetic storage disk. The lubricant is first applied onto the disk surface through conventional coating techniques, such as dipping, spinning, spraying, or vapor deposition. The thickness of the applied coating is thicker than the final bonded thickness of the lubricant. Typically, the applied thickness of the film is approximately 30 Angstroms. The lubricant coated disk surface is then exposed to low energy electron irradiation. The energy level of the accelerated electrons is below 100 eV. The lubricated film is exposed to a dosage level of approximately 1000 microcoulombs per square centimeter. This dosage level bonds approximately 15 Angstroms of lubricant to the disk surface. The non-bonded or excess lubricant is then rinsed off in a liquid freon or other suitable rinse.
    Type: Grant
    Filed: June 6, 1994
    Date of Patent: August 13, 1996
    Assignee: International Business Machine Corporation
    Inventors: Li-Ju J. Lin, John S. Foster, Christopher S. Gudeman, Gerard H. Vurens