Patents by Inventor Gerard P. Quigley

Gerard P. Quigley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Large area, surface discharge pumped, vacuum ultraviolet light source
    Patent number: 5585641
    Abstract: Large area, surface discharge pumped, vacuum ultraviolet (VUV) light source. A contamination-free VUV light source having a 225 cm.sup.2 emission area in the 240-340 nm region of the electromagnetic spectrum with an average output power in this band of about 2 J/cm.sup.2 at a wall-plug efficiency of approximately 5% is described. Only ceramics and metal parts are employed in this surface discharge source. Because of the contamination-free, high photon energy and flux, and short pulse characteristics of the source, it is suitable for semiconductor and flat panel display material processing.
    Type: Grant
    Filed: May 23, 1995
    Date of Patent: December 17, 1996
    Assignee: The Regents of the University of California
    Inventors: Robert C. Sze, Gerard P. Quigley