Patents by Inventor Gerard VAN DEN EIJKEL

Gerard VAN DEN EIJKEL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sensor system, substrate handling system and lithographic apparatus
    Patent number: 10007197
    Abstract: A sensor system configured to determine a position of a substrate having an edge. The sensor system includes a radiation source arranged to emit a radiation bundle, a reflective element, a detector device and a substrate table having a supporting surface for supporting the substrate. The supporting surface is at least partly along a plane. The radiation source and the detector device are arranged on a first side of the plane. The reflective element is arranged on a second side of the plane other than the first side. The reflective element is arranged to create a reflected bundle by reflecting the radiation bundle. The reflective element is arranged to illuminate the edge with the reflected bundle. The detector device is arranged to receive the reflected bundle.
    Type: Grant
    Filed: March 2, 2015
    Date of Patent: June 26, 2018
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Joeri Lof, Joost Kauffman, Martin Dieter Nico Peters, Petrus Theodorus Rutgers, Martijn Hendrikus Wilhelmus Stopel, Gerard Van Den Eijkel, Harmen Klaas Van Der Schoot, Raimond Visser
  • SENSOR SYSTEM, SUBSTRATE HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS
    Publication number: 20160370716
    Abstract: A sensor system configured to determine a position of a substrate having an edge. The sensor system includes a radiation source arranged to emit a radiation bundle, a reflective element, a detector device and a substrate table having a supporting surface for supporting the substrate. The supporting surface is at least partly along a plane. The radiation source and the detector device are arranged on a first side of the plane. The reflective element is arranged on a second side of the plane other than the first side. The reflective element is arranged to create a reflected bundle by reflecting the radiation bundle. The reflective element is arranged to illuminate the edge with the reflected bundle. The detector device is arranged to receive the reflected bundle.
    Type: Application
    Filed: March 2, 2015
    Publication date: December 22, 2016
    Applicant: ASML Netherlands B.V.
    Inventors: Joeri LOF, Joost KAUFFMAN, Martin Dieter Nico PETERS, Petrus Theodorus RUTGERS, Martijn Hendrikus Wilhelmus STOPEL, Gerard VAN DEN EIJKEL, Harmen Klaas VAN DER SCHOOT, Raimond VISSER