Patents by Inventor Gerardo Bottiglieri

Gerardo Bottiglieri has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection method and apparatus
    Patent number: 9360768
    Abstract: A method defines one or more monitoring target profiles, collects and stores initial calibration data of the metrology apparatus, compiling a library of spectra that would be observed from inspection of the monitoring target profiles using the metrology apparatus calibrated according to the initial calibration data. Some operations can be performed periodically, e.g., on a daily basis: obtaining current calibration data from the apparatus, modeling the effect of the current calibration data on the metrology apparatus operation, and using the result of the modeling and the contents of the library to determine any differences between one or more values of the initial calibration data and the current calibration data, and how these changes will be translated into changes in the measurement output for a given number of stacks and geometries.
    Type: Grant
    Filed: May 29, 2012
    Date of Patent: June 7, 2016
    Assignee: ASML Netherlands B.V.
    Inventors: Gerardo Bottiglieri, Elliott Gerard Mc Namara, Ruben Alvarez Sanchez
  • Inspection Method and Apparatus
    Publication number: 20120330592
    Abstract: A method defines one or more monitoring target profiles, collects and stores initial calibration data of the metrology apparatus, compiling a library of spectra that would be observed from inspection of the monitoring target profiles using the metrology apparatus calibrated according to the initial calibration data. Some operations can be performed periodically, e.g., on a daily basis: obtaining current calibration data from the apparatus, modeling the effect of the current calibration data on the metrology apparatus operation, and using the result of the modeling and the contents of the library to determine any differences between one or more values of the initial calibration data and the current calibration data, and how these changes will be translated into changes in the measurement output for a given number of stacks and geometries.
    Type: Application
    Filed: May 29, 2012
    Publication date: December 27, 2012
    Applicant: ASML Netherlands B.V.
    Inventors: Gerardo Bottiglieri, Elliott Gerard Mc Namara, Ruben Alvarez Sanchez