Patents by Inventor Gerardus Adrianus Kusters

Gerardus Adrianus Kusters has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20070242245
    Abstract: A lithographic apparatus is disclosed that is arranged to project a pattern from a patterning device onto a substrate, the lithographic apparatus has a substrate table configured to hold a substrate. The substrate table includes a conditioning system configured to hold a conditioning fluid and to condition the substrate table. The conditioning system includes a pressure damper that is in fluid communication with the conditioning system and is arranged to dampen a pressure variation in the conditioning system.
    Type: Application
    Filed: April 3, 2007
    Publication date: October 18, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Maurice Wijckmans, Martinus Agnes Cuijpers, Martinus Hendrikus Leenders, Frits Van Der Meulen, Joost Ottens, Theodorus Cadee, Frederik De Jong, Wilhelmus Franciscus Simons, Edwin Augustinus Van Gompel, Martin Smeets, Rob Jansen, Gerardus Adrianus Kusters, Martijn Van Baren