Patents by Inventor Gerardus Albertus Wilhelmus Sigbertus PREUSTING

Gerardus Albertus Wilhelmus Sigbertus PREUSTING has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of modelling systems or performing predictive maintenance of systems, such as lithographic systems and associated lithographic systems
    Patent number: 11461675
    Abstract: A method for determining a causal relationship between events in a plurality of parameter time series, the method including: identifying a first event associated with a parameter excursion event; identifying a second event associated with a failure event, wherein there are a plurality of events including the first events and second events; determining values of transfer entropy for pairs of the events to establish a causal relationship for each of the pairs of events; using the determined values of transfer entropy and identified causal relationships to determine a process network, wherein each of the events is a node in the process network, the edges between nodes being dependent upon the values of transfer entropy; identifying a directed cycle within the plurality of events and the causal relationships; classifying a directed cycle; and classifying one or more events having a causal relation to the classified directed cycle.
    Type: Grant
    Filed: February 15, 2018
    Date of Patent: October 4, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: David Evert Song Kook Sigtermans, Marcel Richard André Brunt, Nicolaas Hendrik Frank Ploos Van Amstel, Errol Arthur Zalmijn, Stefan Lucian Voinea, Gerardus Albertus Wilhelmus Sigbertus Preusting
  • METHODS OF MODELLING SYSTEMS OR PERFORMING PREDICTIVE MAINTENANCE OF SYSTEMS, SUCH AS LITHOGRAPHIC SYSTEMS AND ASSOCIATED LITHOGRAPHIC SYSTEMS
    Publication number: 20200342333
    Abstract: A method for determining a causal relationship between events in a plurality of parameter time series, the method including: identifying a first event associated with a parameter excursion event; identifying a second event associated with a failure event, wherein there are a plurality of events including the first events and second events; determining values of transfer entropy for pairs of the events to establish a causal relationship for each of the pairs of events; using the determined values of transfer entropy and identified causal relationships to determine a process network, wherein each of the events is a node in the process network, the edges between nodes being dependent upon the values of transfer entropy; identifying a directed cycle within the plurality of events and the causal relationships; classifying a directed cycle; and classifying one or more events having a causal relation to the classified directed cycle.
    Type: Application
    Filed: February 15, 2018
    Publication date: October 29, 2020
    Applicant: ASML NETHERLANDS B.V.
    Inventors: David Evert Song Kook SIGTERMANS, Marcel Richard Andre BRUNT, Nicolaas Hendrik Frank PLOOS VAN AMSTEL, Errol Arthur ZALMIJN, Stefan Lucian VOINEA, Gerardus Albertus Wilhelmus Sigbertus PREUSTING