Patents by Inventor Gerardus Arnoldus Hendricus Fanciscus Janssen

Gerardus Arnoldus Hendricus Fanciscus Janssen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20090168037
    Abstract: An immersion lithographic projection apparatus is disclosed. The apparatus includes a substrate table for holding a substrate and a liquid supply system for supply liquid to the substrate. The apparatus is constructed and arranged to allow the liquid to flow off the substrate and over at least two edges of a top surface of the substrate table. The geometry of the edge may be optimized to reduce a static thickness of a layer of liquid on the top surface.
    Type: Application
    Filed: December 1, 2008
    Publication date: July 2, 2009
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Roger Johannes Maria Hubertus Kroonen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Ronald Van Der Ham, Niek Jacobus Johannes Roset, Fransiscus Mathijs Jacobs, Michel Riepen, Gerardus Arnoldus Hendricus Fanciscus Janssen, Reinder Wietse Roos, Mattijs Hogeland