Patents by Inventor Gerardus Johannes Verdoes

Gerardus Johannes Verdoes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Masking device, lithographic apparatus, and device manufacturing method
    Patent number: 8059261
    Abstract: A lithographic projection apparatus having a masking device for obscuring part of at least one of a patterning device used for patterning a projection beam before imaging the patterned beam onto a substrate. The masking device includes a first masking structure to obscure said part of said patterning device in a first direction and a second masking structure to obscure said part in a second different direction, wherein said first and second masking structure are disposed in the vicinity of said focal plane in a mechanically uncoupled arrangement with respect to each other.
    Type: Grant
    Filed: May 28, 2004
    Date of Patent: November 15, 2011
    Assignee: ASML Netherlands B.V.
    Inventors: Antoine Hendrik Verweij, Jacobus Frederik Molenaar, Gerbrand Petrus Johannes Van Den Hoven, Michael Johannes Vervoordeldonk, Michel Gerardus Pardoel, Gerardus Johannes Verdoes, Jan Van Eijk