Patents by Inventor Gerardus Maria Johannes Wijnand Janssen

Gerardus Maria Johannes Wijnand Janssen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

Method of forming a substrate for use in calibrating a metrology tool, calibration substrate and metrology tool calibration method

Patent number: 7605907

Abstract: The present invention provides a method for forming a substrate for use in calibrating a metrology tool in order to compensate for orientation-dependent variations within the metrology tool.

Type: Grant

Filed: March 27, 2007

Date of Patent: October 20, 2009

Assignee: ASML Netherlands B.V.

Inventors: Hugo Augustinus Joseph Cramer, Antoine Gaston Marie Kiers, Gerardus Maria Johannes Wijnand Janssen
Method of forming a substrate for use in calibrating a metrology tool, calibration substrate and metrology tool calibration method

Publication number: 20080239277

Abstract: The present invention provides a method for forming a substrate for use in calibrating a metrology tool in order to compensate for orientation-dependent variations within the metrology tool.

Type: Application

Filed: March 27, 2007

Publication date: October 2, 2008

Applicant: ASML Netherlands B.V.

Inventors: Hugo Augustinus Joseph Cramer, Antoine Gaston Marie Kiers, Gerardus Maria Johannes Wijnand Janssen

Method of forming a substrate for use in calibrating a metrology tool, calibration substrate and metrology tool calibration method

Method of forming a substrate for use in calibrating a metrology tool, calibration substrate and metrology tool calibration method