Patents by Inventor Gerardus Verdoes

Gerardus Verdoes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Masking device, lithographic apparatus, and device manufacturing method
    Publication number: 20050012913
    Abstract: A lithographic projection apparatus having a masking device for obscuring part of at least one of a patterning device used for patterning a projection beam before imaging the patterned beam onto a substrate. The masking device includes a first masking structure to obscure said part of said patterning device in a first direction and a second masking structure to obscure said part in a second different direction, wherein said first and second masking structure are disposed in the vicinity of said focal plane in a mechanically uncoupled arrangement with respect to each other.
    Type: Application
    Filed: May 28, 2004
    Publication date: January 20, 2005
    Applicant: ASML Netherlands B.V.
    Inventors: Antoine Verweij, Jacobus Molenaar, Gerbrand Van Den Hoven, Michael Vervoordeldonk, Michel Pardoel, Gerardus Verdoes