Abstract: A method of examining a cryogenic specimen in a Charged Particle Microscope, comprising: Providing the specimen in a cryogenic cell on a specimen holder; Directing a charged particle beam from a source and along an axis through an evacuated beam conduit of an illuminator system so as to irradiate at least a portion of the specimen therewith; Using a detector to detect radiation emanating from the specimen in response to said irradiation, further comprising: Configuring said cell to comprise an elongate tube that extends within said beam conduit into said illuminator system and encloses said axis; Maintaining said tube at a cryogenic temperature at least during said irradiation.

Abstract: A charged particle microscope and a method of operating a charged particle microscope are disclosed. The microscope employs a source for producing charged particles, and a source lens below the source to form a charged particle beam which is directed onto a specimen by a condenser system. A detector collects radiation emanating from the specimen in response to irradiation of the specimen by the beam. The source lens is a compound lens, focusing the beam within a vacuum enclosure using both a magnetic lens having permanent magnets outside the enclosure to produce a magnetic field at the beam, and a variable electrostatic lens within the enclosure.

Abstract: A method of examining a cryogenic specimen in a Charged Particle Microscope, comprising: Providing the specimen in a cryogenic cell on a specimen holder; Directing a charged particle beam from a source and along an axis through an evacuated beam conduit of an illuminator system so as to irradiate at least a portion of the specimen therewith; Using a detector to detect radiation emanating from the specimen in response to said irradiation, further comprising: Configuring said cell to comprise an elongate tube that extends within said beam conduit into said illuminator system and encloses said axis; Maintaining said tube at a cryogenic temperature at least during said irradiation.

Abstract: A charged particle microscope and a method of operating a charged particle microscope are disclosed. The microscope employs a source for producing charged particles, and a source lens below the source to form a charged particle beam which is directed onto a specimen by a condenser system. A detector collects radiation emanating from the specimen in response to irradiation of the specimen by the beam. The source lens is a compound lens, focusing the beam within a vacuum enclosure using both a magnetic lens having permanent magnets outside the enclosure to produce a magnetic field at the beam, and a variable electrostatic lens within the enclosure.

Abstract: A method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier. The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier. The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals, showing metals with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.

Abstract: The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder (40) to a second position in a second holder (10) and/or vice versa, each holder (10, 40) equipped to detachably hold the specimen, the transfer of the specimen between the holders taking place in a transfer position different from the second position, characterized in that when the specimen is transferred between the holders (10, 40) a mechanical guidance mechanism positions the holders with a mutual accuracy higher than the mutual accuracy in the second position, and said mechanical guidance mechanism not positioning at least one of the holders (10, 40) when the specimen is in the second position. The mechanical guidance mechanism may comprise extra parts (50). At least one of the holders (40) may be equipped to hold a multitude of specimens.

Abstract: The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder (40) to a second position in a second holder (10) and/or vice versa, each holder (10, 40) equipped to detachably hold the specimen, the transfer of the specimen between the holders taking place in a transfer position different from the second position, characterized in that when the specimen is transferred between the holders (10, 40) a mechanical guidance mechanism positions the holders with a mutual accuracy higher than the mutual accuracy in the second position, and said mechanical guidance mechanism not positioning at least one of the holders (10, 40) when the specimen is in the second position. The mechanical guidance mechanism may comprise extra parts (50). At least one of the holders (40) may be equipped to hold a multitude of specimens.

Abstract: The invention relates to a thermal switch for particle-optical apparatus. In, for example, a cryo-TEM (transmission electron microscope), a sample 34 that is placed at an extremity 20 of a sample holder 7 can be maintained at, for example, the temperature of liquid nitrogen. There is a need to be able to inspect a sample at, for example, room temperature in a simple manner, without heating the microscope as a whole from the cryogenic temperature to room temperature. By using the thermal switch 40, this becomes possible. To this end, the thermal switch changes the thermal path between a cold source 22 in the apparatus and the extremity 20 of the sample holder 7, whereby, in one position, position 46a, a connection is made from the extremity 20 to the cold source 22, and, in the other position, position 46b, a connection is made to a portion 44 of the apparatus that is maintained at room temperature.

Abstract: The invention relates to a thermal switch for particle-optical apparatus. In, for example, a cryo-TEM (transmission electron microscope), a sample 34 that is placed at an extremity 20 of a sample holder 7 can be maintained at, for example, the temperature of liquid nitrogen. There is a need to be able to inspect a sample at, for example, room temperature in a simple manner, without heating the microscope as a whole from the cryogenic temperature to room temperature. By using the thermal switch 40, this becomes possible. To this end, the thermal switch changes the thermal path between a cold source 22 in the apparatus and the extremity 20 of the sample holder 7, whereby, in one position, position 46a, a connection is made from the extremity 20 to the cold source 22, and, in the other position, position 46b, a connection is made to a portion 44 of the apparatus that is maintained at room temperature.

Abstract: Sample carriers for use in Transmission Electron Microscopes (TEMs) and freely commercially available have the form of a gauze with a strengthening edge. The thickness of these known sample carriers is of the order of magnitude of 20 ?m, and is uniform across the entire sample holder. The tiny thickness of these fragile sample carriers makes manipulation difficult. There is a desire to realize automatic introduction and removal of sample carriers in a TEM, seeing as this would make it possible to use the TEM continuously, without human intervention. The invention describes a robust sample carrier whereby—both in the case of manual and automatic manipulation—deformation of and/or damage to the sample carrier is avoided. This is achieved by employing a strengthening edge portion 2 with a thickness 6 larger than the thickness 5 of the middle portion 1 of the sample carrier. The ability to use the sample carrier in analyses in which tilting is important is hereby not impeded.

Abstract: Sample carriers for use in Transmission Electron Microscopes (TEMs) and freely commercially available have the form of a gauze with a strengthening edge. The thickness of these known sample carriers is of the order of magnitude of 20 &mgr;m, and is uniform across the entire sample holder. The tiny thickness of these fragile sample carriers makes manipulation difficult. There is a desire to realize automatic introduction and removal of sample carriers in a TEM, seeing as this would make it possible to use the TEM continuously, without human intervention.