Patents by Inventor Gerd Fehlauer

Gerd Fehlauer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process flow for thick isolation collar with reduced length
    Patent number: 6605838
    Abstract: A trench capacitor memory cell structure is provided with includes a vertical collar region that suppresses current leakage of an adjacent vertical parasitic transistor that exists between the vertical MOSFET and the underlying trench capacitor. The vertical collar isolation, which has a vertical length of about 0.50 &mgr;m or less, includes a first portion that is present partially outside the trench and a second portion that is present inside the trench. The first portion of the collar oxide is thicker than said second portion oxide thereby reducing parasitic current leakage.
    Type: Grant
    Filed: September 30, 2002
    Date of Patent: August 12, 2003
    Assignees: International Business Machines Corporation, Infineon Technologies North America Corporation
    Inventors: Jack A. Mandelman, Rama Divakaruni, Gerd Fehlauer, Stephan Kudelka, Uwe Schroeder, Helmut H. Tews