Abstract: A drive for the piston of a linear cooler includes a magnet (6), a linear oscillation coil (3) and a power supply for the coil (3) with a flexible section of line (11) running from a fixed support component (1) to the oscillating coil (3). To increase its life-time, the line section (11) is either made from a bent strip of metal, preferably copper or a copper alloy, or from three components, a metal core, an insulating sheath surround the metal core and a support spring surrounding said sheath.

Abstract: The invention relates to a process for regenerating a cryopump (1) that is equipped with an inlet valve (33), with cold surfaces (6, 8, 11) which have a temperature during operation of the pump that effects the condensation and/or adsorption of gases and which are heated for the purpose of regenerating them, the cryopump further including a backing pump (45) that is connected with the pump interior (9) by way of a valve (44). In this process, heating of the cold surfaces begins if the inlet valve (33) is closed and the connection between the pump interior (9) and the connected backing pump (45) is blocked so that, in addition to the temperature of the cold surfaces, the pressure in the pump interior also rises to values that lie above the corresponding values of the triple point of the gas to be removed.