Patents by Inventor Gerd Orgeich

Gerd Orgeich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputtering with cooled target
    Publication number: 20070240977
    Abstract: The present invention concerns a device and a method for coating substrates by means of sputtering a coating material in the form of a target, wherein the target is cooled during sputtering by means of a cooling medium fed at the target or past the region of the target or through the target, and the cooling medium has a feed temperature of less than 20° C.
    Type: Application
    Filed: February 20, 2007
    Publication date: October 18, 2007
    Applicant: Applied Materials GmbH & Co. KG
    Inventors: Joerg Krempel-Hesse, Anke Hellmich, Gerd Orgeich, Thomas Hegemann