Patents by Inventor Gerd Steinfuhrer

Gerd Steinfuhrer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for purifying laser gas
    Patent number: 5430752
    Abstract: An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liqid nitrogen (12).
    Type: Grant
    Filed: June 9, 1994
    Date of Patent: July 4, 1995
    Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern MbH
    Inventors: Dirk Basting, Gerd Steinfuhrer, Frank Voss
  • Apparatus for purifying laser gas
    Patent number: 5136605
    Abstract: An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liquid nitrogen (12).
    Type: Grant
    Filed: March 15, 1991
    Date of Patent: August 4, 1992
    Assignee: Lambda Physik Gesellschaft zur Herstellung von Lasern mbH
    Inventors: Dirk Basting, Gerd Steinfuhrer, Frank Voss
  • Laser gas purifying apparatus
    Patent number: 5111473
    Abstract: In an apparatus for purifying laser gas, comprising a cooling circuit for cleaning of the laser gas, the cooling circuit is separable from the laser and operable by way of a shunt line, independently of the laser.
    Type: Grant
    Filed: January 22, 1991
    Date of Patent: May 5, 1992
    Assignee: Lambda Physik Forschungs- und Entwicklungsgesellschaft mbH
    Inventors: Ulrich Rebhan, Gerd Steinfuhrer, Frank Voss, Peter Oesterlin
  • Ignitor for the preionization of a gas-discharge laser
    Patent number: 4980894
    Abstract: An ignitor for a preionizing means of an excimer laser has an electrically conductive core which projects into the gas space of the laser and which is surrounded by a jacket of a fluoroplastic. The jacket is brought into sealing engagement with the wall of the laser gas space by means of a pressure sleeve via mating conical surfaces.
    Type: Grant
    Filed: August 31, 1989
    Date of Patent: December 25, 1990
    Assignee: Lambda Physik Forschungs-und Entwicklungs-Gesellschaft mbH
    Inventor: Gerd Steinfuhrer
  • Preionization means for a gas-discharge laser
    Patent number: 4951295
    Abstract: A preionization means for a gas-discharge laser, such as an excimer laser, comprises a stirrup member 26 and a preionization strip 20 secured thereto. To obtain the longest possible life of the laser with economical material use the preionization strip 20 is made from a different material from the stirrup member 26.
    Type: Grant
    Filed: May 19, 1989
    Date of Patent: August 21, 1990
    Assignee: Lambda-Physik Forschungs-und Entwicklungs GmbH
    Inventor: Gerd Steinfuhrer