Patents by Inventor Gerhard Ahlborn

Gerhard Ahlborn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers
    Patent number: 6721345
    Abstract: An excimer or molecular fluorine laser system is provided which emits a laser beam during operation and has a gas mixture with a gas composition initially provided within a discharge chamber. The laser system includes a discharge chamber containing a laser gas mixture at least including a halogen-containing species and a buffer gas, multiple electrodes within the discharge chamber and connected to a discharge circuit for energizing the gas mixture, a resonator for generating a laser beam, an electrostatic precipitator for having a voltage applied thereto and for receiving and precipitating contaminant particulates from a flow of the gas mixture, and a processor for monitoring the corona discharge ignition voltage of the electrostatic precipitator and for determining a status of said gas mixture based on the monitored voltage.
    Type: Grant
    Filed: July 12, 2001
    Date of Patent: April 13, 2004
    Assignee: Lambda Physik AG
    Inventors: Igor Bragin, Juergen Kleinschmidt, Gerhard Ahlborn
  • Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers
    Publication number: 20020021731
    Abstract: An excimer or molecular fluorine laser system is provided which emits a laser beam during operation and has a gas mixture with a gas composition initially provided within a discharge chamber. The laser system includes a discharge chamber containing a laser gas mixture at least including a halogen-containing species and a buffer gas, multiple electrodes within the discharge chamber and connected to a discharge circuit for energizing the gas mixture, a resonator for generating a laser beam, an electrostatic precipitator for having a voltage applied thereto and for receiving and precipitating contaminant particulates from a flow of the gas mixture, and a processor for monitoring the corona discharge ignition voltage of the electrostatic precipitator and for determining a status of said gas mixture based on the monitored voltage.
    Type: Application
    Filed: July 12, 2001
    Publication date: February 21, 2002
    Applicant: Lambda Physik AG
    Inventors: Igor Bragin, Juergen Kleinschmidt, Gerhard Ahlborn