Abstract: A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the X-ray source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane.

Abstract: An illumination module (101) for an optical apparatus comprises a light source unit (102), which is configured to selectively emit light along a multiplicity of beam paths (112) in each case. The illumination module (101) also comprises a multiplicity of optical elements (201-203) arranged with lateral offset from one another, wherein each optical element (201-203) of the multiplicity of optical elements (201-203) is configured to transform at least one corresponding beam path (112) of the multiplicity of beam paths.

Abstract: A method for operating a light microscope with structured illumination includes: providing illumination patterns by means of a structuring device which splits impinging light into at least three coherent beam parts which correspond to a ?1., 0., and +1. diffraction orders of light; generating different phases of the illumination patterns by setting different phase values for the beam parts with phase shifters; and recording at least one microscope image for each of the illumination patterns and calculating a high resolution image from the microscope images. Phase shifters are provided not only for the beam parts of the ?1. and +1. diffraction orders but also at least one phase shifter for the beam part of the 0. diffraction order. At least two different phase values ?0 are set with the at least one phase shifter for the 0. diffraction order to provide a plurality of illumination patterns with different phases.

Abstract: A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the light source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane.

Abstract: A light microscope comprises: a structuring optical unit comprising a waveguide chip for providing a structured illumination; an input selection device for variably directing light to one of several inputs of the waveguide chip; the waveguide chip further comprising a light guide path following each of the inputs; each light guide path divides into several path divisions; and each path division leads to one output of the wave-guide chip. The outputs of the waveguide chip can be arranged at a pupil plane of the light microscope, and an exit direction of light from the outputs is transverse to a plane defined by the waveguide chip. A method for providing structured illumination light using the light microscope is also described.

Abstract: An optical device includes a sample holder configured to fix an object in the beam path of the optical device, and an illumination module which has a plurality of light sources and configured to illuminate the object from a plurality of illumination directions by operating the light sources, wherein each illumination direction has an assigned luminous field. The optical device also has a filter arranged between the illumination module and the sample holder and configured to expand the assigned luminous field for each illumination direction. As a result, it is possible to reduce artefacts on account of contaminants during the angularly-selective illumination. Techniques of digital artefact reduction are also described. By way of example, the optical device can be a microscope.

Abstract: A light microscope comprises: a structuring optical unit comprising a waveguide chip for providing a structured illumination; an input selection device for variably directing light to one of several inputs of the waveguide chip; the waveguide chip further comprising a light guide path following each of the inputs; each light guide path divides into several path divisions; and each path division leads to one output of the wave-guide chip. The outputs of the waveguide chip can be arranged at a pupil plane of the light microscope, and an exit direction of light from the outputs is transverse to a plane defined by the waveguide chip. A method for providing structured illumination light using the light microscope is also described.

Abstract: Systems and methods for localizing intraocular lens and/or existing refractive index patterns, to laser write-patterns, and to refractive index patterns in order to modify the refractive index by application of femtosecond laser pulses. OCT-based confocal detection and sectional image systems are provided for localization purposes, the systems being particularly suitable for the detection of phase patterns in addition to the localization of the IOL. With respect to laser write-patterns, the modification of existing refractive index patterns in the IOL is carried out by destroying existing structures or supplementing existing refractive index patterns.

Abstract: An illumination module (101) for an optical apparatus comprises a light source unit (102), which is configured to selectively emit light along a multiplicity of beam paths (112) in each case. The illumination module (101) also comprises a multiplicity of optical elements (201-203) arranged with lateral offset from one another, wherein each optical element (201-203) of the multiplicity of optical elements (201-203) is configured to transform at least one corresponding beam path (112) of the multiplicity of beam paths.

Abstract: A method for operating a light microscope with structured illumination includes: providing illumination patterns by means of a structuring device which splits impinging light into at least three coherent beam parts which correspond to a ?1., 0., and +1. diffraction orders of light; generating different phases of the illumination patterns by setting different phase values for the beam parts with phase shifters; and recording at least one microscope image for each of the illumination patterns and calculating a high resolution image from the microscope images. Phase shifters are provided not only for the beam parts of the ?1. and +1. diffraction orders but also at least one phase shifter for the beam part of the 0. diffraction order. At least two different phase values ?0 are set with the at least one phase shifter for the 0. diffraction order to provide a plurality of illumination patterns with different phases.

Abstract: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.

Abstract: An optical device includes a sample holder configured to fix an object in the beam path of the optical device, and an illumination module which has a plurality of light sources and configured to illuminate the object from a plurality of illumination directions by operating the light sources, wherein each illumination direction has an assigned luminous field. The optical device also has a filter arranged between the illumination module and the sample holder and configured to expand the assigned luminous field for each illumination direction. As a result, it is possible to reduce artefacts on account of contaminants during the angularly-selective illumination. Techniques of digital artefact reduction are also described. By way of example, the optical device can be a microscope.

Abstract: An optical arrangement for being positioned in a beam path of a light microscope, having at least a first and a second optical assembly for providing structured illumination light from incident light. The optical arrangement provides for light to be guided over different beam paths to the various optical assemblies and in the direction of a sample. Electronic control means are provided and designed to illuminate, in each case, a beam path from the different beam paths to different optical assemblies at a point in time, in that at least a first beam combination mirror is provided for guiding light coming from various optical assemblies to a common beam path in the direction of a sample. The first beam combination mirror has reflective areas on which only light from one of the two optical assemblies is incident and has the light-permeable areas of the beam combination mirror in which only light from the other of the optical assemblies is incident.

Abstract: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.

Abstract: Systems and methods for localizing intraocular lens and/or existing refractive index patterns, to laser write-patterns, and to refractive index patterns in order to modify the refractive index by application of femtosecond laser pulses. OCT-based confocal detection and sectional image systems are provided for localization purposes, the systems being particularly suitable for the detection of phase patterns in addition to the localization of the IOL. With respect to laser write-patterns, the modification of existing refractive index patterns in the IOL is carried out by destroying existing structures or supplementing existing refractive index patterns.

Abstract: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.

Abstract: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.

Abstract: A beam combiner in a light scanning microscope for combining two illuminating beams that can be independently scanned. A first beam path (B1) guides a first illuminating beam (2) along a first optical axis (OA1) and a first optical device (L1) bundles the first beam (2) in an intermediate image plane. A second beam path (B2) guides a second illuminating beam (3) along a second optical axis (OA2) that intersects the first optical axis (OA1) at a point of intersection (Z) lying in or near the intermediate image plane, and a scanner (S2) for deflecting the second illuminating beam (3) and arranged before the point of intersection (Z) of the optical axes (OA1, OA2) in the propagation direction of the second illuminating beam (3).

Abstract: A luminescence microscopy method includes a sample being used, which comprises a certain substance, wherein the certain substance can be converted repeatedly from a first state, in which it can be excited into emitting luminescence radiation, into a second state, in which it cannot be excited into emitting luminescence radiation. The substance present in the sample can be brought into the first state by irradiating switch radiation. The certain substance can be excited into emitting luminescence radiation by irradiating excitation radiation. The sample emitting luminescence radiation can be displayed. A high-resolution selection of sample regions extending perpendicularly to a sample surface is carried out by irradiating either the switch radiation or the excitation radiation as structured illumination of the sample. A high-resolution selection of the sample surface is carried out by irradiating the switch radiation and/or the excitation radiation as TIRF illumination of the sample.

Abstract: A beam combiner in a light scanning microscope for combining two illuminating beams that can be independently scanned. A first beam path (B1) guides a first illuminating beam (2) along a first optical axis (OA1) and a first optical device (L1) bundles the first beam (2) in an intermediate image plane. A second beam path (B2) guides a second illuminating beam (3) along a second optical axis (OA2) that intersects the first optical axis (OA1) at a point of intersection (Z) lying in or near the intermediate image plane, and a scanner (S2) for deflecting the second illuminating beam (3) and arranged before the point of intersection (Z) of the optical axes (OA1, OA2) in the propagation direction of the second illuminating beam (3).