Abstract: A high-resolution computed tomography technique employs a “compucentric” rotational axis to keep the region of interest (ROI) centered in the detector's field of view at all angles. The system calibrates mechanical and optical misalignments by capturing projections of a high-contrast object at multiple positions. The resulting geometry model, including stage runout and thermal drift corrections, is then applied to the sample of interest. Each projection view is associated with specific positioning parameters, ensuring accurate data registration for reconstruction. By using a virtual rotation axis and per-view geometry descriptors, the method produces superior resolution and fewer artifacts than tomography created from misaligned systems, and involves more labor than conventional physical alignment techniques.

Abstract: An X-ray microscopy system provides guided acquisition parameter selection. Specifically, a computer projections from the detector subsystem and generates a user interface for guiding a user to select acquisition parameters for the projections.

Abstract: An X-ray microscopy system and method for phase contrast and dark-field imaging utilize a partially coherent X-ray beam generated by a micro-focused X-ray source with a small focal spot size. A spatial beam modulator such as a random phase object, e.g., silicon carbide sandpaper, is placed between the source and the sample to create a random granular speckle pattern. The system employs a high-resolution detection setup with a thin scintillator and a spatially resolved detector with small pixel size to capture shifts in the speckle pattern caused by the sample's refraction effects. By analyzing these shifts, the system computes phase gradients and integrates them to produce detailed phase images, enhancing contrast in low-atomic-number materials like soft tissues and polymers. The compact design reduces source-to-detector distance, improving flux efficiency and system throughput while enabling high-resolution, three-dimensional tomographic imaging.

Abstract: An imaging optical arrangement serves to image an object illuminated by X-rays. An imaging optics serves to image a transfer field in a field plane into a detection field in a detection plane. A layer of scintillator material is arranged at the transfer field. A stop is arranged in a pupil plane of the imaging optics. The imaging optics has an optical axis. A center of a stop opening of the stop is arranged at a decentering distance with respect to the optical axis. Such imaging optical arrangement ensures a high quality imaging of the object irrespective of a tilt of X-rays entering the transfer field. The imaging optical arrangement is part of a detection assembly further comprising a detection array and an object mount. Such detection assembly is part of a detection system further comprising an X-ray source.

Abstract: A method and system for scanning a sample to minimize effects of aberrant detector pixels and fixed imperfections in the imaging path in X-ray microscopy. The method involves moving, i.e., dithering, the sample perpendicular to the X-ray beamline between the source and the detector while capturing projections of the sample, possibly in a continuous fashion. Projection parameters associated with the sample movement, including non-ideal movement of the sample toward and away from the detector, are calculated based on the exact or average position at the time of exposure/trigger. The projections are compensated for the non-ideal movement by changing the geometry description. View angles can be re-estimated and the projections are sorted according to view angle instead of acquisition order. Finally, the reconstruction of the sorted projections is performed using varying magnification reconstruction methods to compensate for the slightly changed geometric magnification.

Abstract: An imaging optical arrangement serves to image an object illuminated by X-rays. An imaging optics serves to image a transfer field in a field plane into a detection field in a detection plane. A layer of scintillator material is arranged at the transfer field. A stop is arranged in a pupil plane of the imaging optics. The imaging optics has an optical axis. A center of a stop opening of the stop is arranged at a decentering distance with respect to the optical axis. Such imaging optical arrangement ensures a high quality imaging of the object irrespective of a tilt of X-rays entering the transfer field. The imaging optical arrangement is part of a detection assembly further comprising a detection array and an object mount. Such detection assembly is part of a detection system further comprising an X-ray source.

Abstract: A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the X-ray source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane.

Abstract: An illumination module (101) for an optical apparatus comprises a light source unit (102), which is configured to selectively emit light along a multiplicity of beam paths (112) in each case. The illumination module (101) also comprises a multiplicity of optical elements (201-203) arranged with lateral offset from one another, wherein each optical element (201-203) of the multiplicity of optical elements (201-203) is configured to transform at least one corresponding beam path (112) of the multiplicity of beam paths.

Abstract: A method for operating a light microscope with structured illumination includes: providing illumination patterns by means of a structuring device which splits impinging light into at least three coherent beam parts which correspond to a ?1., 0., and +1. diffraction orders of light; generating different phases of the illumination patterns by setting different phase values for the beam parts with phase shifters; and recording at least one microscope image for each of the illumination patterns and calculating a high resolution image from the microscope images. Phase shifters are provided not only for the beam parts of the ?1. and +1. diffraction orders but also at least one phase shifter for the beam part of the 0. diffraction order. At least two different phase values ?0 are set with the at least one phase shifter for the 0. diffraction order to provide a plurality of illumination patterns with different phases.

Abstract: A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the light source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane.

Abstract: A light microscope comprises: a structuring optical unit comprising a waveguide chip for providing a structured illumination; an input selection device for variably directing light to one of several inputs of the waveguide chip; the waveguide chip further comprising a light guide path following each of the inputs; each light guide path divides into several path divisions; and each path division leads to one output of the wave-guide chip. The outputs of the waveguide chip can be arranged at a pupil plane of the light microscope, and an exit direction of light from the outputs is transverse to a plane defined by the waveguide chip. A method for providing structured illumination light using the light microscope is also described.

Abstract: An optical device includes a sample holder configured to fix an object in the beam path of the optical device, and an illumination module which has a plurality of light sources and configured to illuminate the object from a plurality of illumination directions by operating the light sources, wherein each illumination direction has an assigned luminous field. The optical device also has a filter arranged between the illumination module and the sample holder and configured to expand the assigned luminous field for each illumination direction. As a result, it is possible to reduce artefacts on account of contaminants during the angularly-selective illumination. Techniques of digital artefact reduction are also described. By way of example, the optical device can be a microscope.

Abstract: A light microscope comprises: a structuring optical unit comprising a waveguide chip for providing a structured illumination; an input selection device for variably directing light to one of several inputs of the waveguide chip; the waveguide chip further comprising a light guide path following each of the inputs; each light guide path divides into several path divisions; and each path division leads to one output of the wave-guide chip. The outputs of the waveguide chip can be arranged at a pupil plane of the light microscope, and an exit direction of light from the outputs is transverse to a plane defined by the waveguide chip. A method for providing structured illumination light using the light microscope is also described.

Abstract: Systems and methods for localizing intraocular lens and/or existing refractive index patterns, to laser write-patterns, and to refractive index patterns in order to modify the refractive index by application of femtosecond laser pulses. OCT-based confocal detection and sectional image systems are provided for localization purposes, the systems being particularly suitable for the detection of phase patterns in addition to the localization of the IOL. With respect to laser write-patterns, the modification of existing refractive index patterns in the IOL is carried out by destroying existing structures or supplementing existing refractive index patterns.

Abstract: An illumination module (101) for an optical apparatus comprises a light source unit (102), which is configured to selectively emit light along a multiplicity of beam paths (112) in each case. The illumination module (101) also comprises a multiplicity of optical elements (201-203) arranged with lateral offset from one another, wherein each optical element (201-203) of the multiplicity of optical elements (201-203) is configured to transform at least one corresponding beam path (112) of the multiplicity of beam paths.

Abstract: A method for operating a light microscope with structured illumination includes: providing illumination patterns by means of a structuring device which splits impinging light into at least three coherent beam parts which correspond to a ?1., 0., and +1. diffraction orders of light; generating different phases of the illumination patterns by setting different phase values for the beam parts with phase shifters; and recording at least one microscope image for each of the illumination patterns and calculating a high resolution image from the microscope images. Phase shifters are provided not only for the beam parts of the ?1. and +1. diffraction orders but also at least one phase shifter for the beam part of the 0. diffraction order. At least two different phase values ?0 are set with the at least one phase shifter for the 0. diffraction order to provide a plurality of illumination patterns with different phases.

Abstract: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.

Abstract: An optical device includes a sample holder configured to fix an object in the beam path of the optical device, and an illumination module which has a plurality of light sources and configured to illuminate the object from a plurality of illumination directions by operating the light sources, wherein each illumination direction has an assigned luminous field. The optical device also has a filter arranged between the illumination module and the sample holder and configured to expand the assigned luminous field for each illumination direction. As a result, it is possible to reduce artefacts on account of contaminants during the angularly-selective illumination. Techniques of digital artefact reduction are also described. By way of example, the optical device can be a microscope.

Abstract: An optical arrangement for being positioned in a beam path of a light microscope, having at least a first and a second optical assembly for providing structured illumination light from incident light. The optical arrangement provides for light to be guided over different beam paths to the various optical assemblies and in the direction of a sample. Electronic control means are provided and designed to illuminate, in each case, a beam path from the different beam paths to different optical assemblies at a point in time, in that at least a first beam combination mirror is provided for guiding light coming from various optical assemblies to a common beam path in the direction of a sample. The first beam combination mirror has reflective areas on which only light from one of the two optical assemblies is incident and has the light-permeable areas of the beam combination mirror in which only light from the other of the optical assemblies is incident.

Abstract: An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.