Patents by Inventor Gerhart Fuerter

Gerhart Fuerter has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Arrangement of optical elements in a microlithographic projection exposure apparatus
    Patent number: 7474469
    Abstract: The invention relates to an arrangement of optical elements in a microlithographic projection exposure apparatus, particularly in a projection objective of a microlithographic projection exposure apparatus. The arrangement comprises a rigid first optical element, a rigid second optical element with a first optical surface and a second optical surface on opposite sides and a first liquid. The first optical element has a concave optical surface. The first side of the second optical element is facing the concave optical surface of the first optical element. The first liquid is at least partially filling the space between the first optical element and the second optical element.
    Type: Grant
    Filed: September 22, 2005
    Date of Patent: January 6, 2009
    Assignee: Carl Zeiss SMT AG
    Inventors: Michael Totzeck, Gerhart Fuerter, Olaf Dittmann, Karl-Heinz Schuster, David Shafer, Susanne Beder, Wolfgang Singer
  • Arrangement of optical elements in a microlithographic projection exposure apparatus
    Publication number: 20060066962
    Abstract: The invention relates to an arrangement of optical elements in a microlithographic projection exposure apparatus, particularly in a projection objective of a microlithographic projection exposure apparatus. The arrangement comprises a rigid first optical element, a rigid second optical element with a first optical surface and a second optical surface on opposite sides and a first liquid. The first optical element has a concave optical surface. The first side of the second optical element is facing the concave optical surface of the first optical element. The first liquid is at least partially filling the space between the first optical element and the second optical element.
    Type: Application
    Filed: September 22, 2005
    Publication date: March 30, 2006
    Applicant: Carl Zeiss SMT AG
    Inventors: Michael Totzeck, Gerhart Fuerter, Olaf Dittmann, Karl-Heinz Schuster, David Shafer, Susanne Beder