Abstract: An amorphous material containing silicon, carbon, hydrogen and nitrogen, provides a barrier/etch stop layer for use with low dielectric constant insulating layers and copper interconnects. The amorphous material is prepared by plasma assisted chemical vapor deposition (CVD) of alklysilanes together with nitrogen and ammonia. Material that at the same time has a dielectric constant less than 4.5, an electrical breakdown field about 5 MV/cm, and a leakage current less than or on the order of 1 nA/cm2 at a field strength of 1 MV/cm has been obtained. The amorphous material meets the requirements for use as a barrier/etch stop layer in a standard damascene fabrication process.

Abstract: An amorphous material containing silicon, carbon, hydrogen and nitrogen, provides a barrier/etch stop layer for use with low dielectric constant insulating layers and copper interconnects. The amorphous material is prepared by plasma assisted chemical vapor deposition (CVD) of alklysilanes together with nitrogen and ammonia. Material that at the same time has a dielectric constant less than 4.5, an electrical breakdown field about 5 MV/cm, and a leakage current less than or on the order of 1 nA/cm2 at a field strength of 1 Mv/cm has been obtained. The amorphous material meets the requirements for use as a barrier/etch stop layer in a standard damascene fabrication process.

Abstract: A vehicle seat belt retractor has a frame, a spool rotatably mounted to the frame and a spool locking device for locking the spool against rotation. The spool locking device includes actuating means for actuating the locking device. The actuating means is a support carrying a mass and a pawl, the mass being arranged to move from an initial position to an actuating position to actuate the pawl into engagement with the ratchet on the spool. The actuating means is an adjustment mechanism for adjusting the distance between the pawl and the ratchet. The adjustment mechanism may adjust the support relative to a housing, and adjust the tip of the pawl relative to the pawl body or a deformable pawl tip.