Patents by Inventor Gerry Mei

Gerry Mei has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High electron mobility transistor semiconductor device and fabrication method thereof
    Patent number: 7582518
    Abstract: In a method of forming a semiconductor device on a semiconductor substrate (100), a photoresist layer (102) is deposited on the semiconductor substrate; a window (106) is formed in the photoresist layer (102) by electron beam lithography; a conformal layer (108) is deposited on the photoresist layer (102) and in the window (106); and substantially all of the conformal layer (108) is selectively removed from the photoresist layer (102) and a bottom portion of the window to form dielectric sidewalls (110) in the window (106).
    Type: Grant
    Filed: November 14, 2006
    Date of Patent: September 1, 2009
    Assignee: Northrop Grumman Space & Mission Systems Corp.
    Inventors: Linh Dang, Wayne Yoshida, Gerry Mei, Jennifer Wang, Po-Hsin Liu, Jane Lee, Weidong Liu, Mike Barsky, Rich Lai