Patents by Inventor Gershon Perelman
Gershon Perelman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7675031Abstract: Auxiliary electrodes for creating drag fields may be provided as arrays of finger electrodes on thin substrates such as printed circuit board material for insertion between main RF electrodes of a multipole. A progressive range of voltages can be applied along lengths of the auxiliary electrodes by implementing a voltage divider that utilizes static resisters interconnecting individual finger electrodes of the arrays. Dynamic voltage variations may be applied to individual finger electrodes or to groups of the finger electrodes.Type: GrantFiled: May 29, 2008Date of Patent: March 9, 2010Assignee: Thermo Finnigan LLCInventors: Michael Konicek, Adrian Land, Gershon Perelman, Lee Earley, Mark Hardman
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Patent number: 7554655Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams which illuminate the surface of the wafer from approximately 6 to 39 degrees. Each laser is oriented at an azimuth angle 45 degrees from the orientation of the manhattan geometry on the wafer, and 90 degrees in azimuth from one another. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens.Type: GrantFiled: May 22, 2008Date of Patent: June 30, 2009Assignee: KLA-Tencor CorporationInventors: Christopher R. Fairley, Tao Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai
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Publication number: 20090120191Abstract: Methods and apparatus for inspecting tubes or pipes preferably includes at least one sealed inspection pig having a length to diameter relationship based on a known bend radius of a tube or pipe to be inspected. A plurality of such pigs may be used where such pigs are interconnected, sealed, and releasable by design and where an inspection transducer is located approximately centrally between the ends of at least one of the pigs.Type: ApplicationFiled: November 8, 2007Publication date: May 14, 2009Inventors: Steven Morrison, Gershon Perelman
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Patent number: 7522275Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens. A brightfield beamsplitter in the system is removable, and preferably replaced with a blank when performing darkfield illumination. Light level control for the system is provided by a dual polarizer first stage.Type: GrantFiled: August 14, 2007Date of Patent: April 21, 2009Assignee: KLA-Tencor CorporationInventors: Christopher R. Fairley, Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai
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Publication number: 20080225298Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams which illuminate the surface of the wafer from approximately 6 to 39 degrees. Each laser is oriented at an azimuth angle 45 degrees from the orientation of the manhattan geometry on the wafer, and 90 degrees in azimuth from one another. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens.Type: ApplicationFiled: May 22, 2008Publication date: September 18, 2008Applicant: KLA-Tencor CorporationInventors: Christopher R. Fairley, Tao Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai
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Patent number: 7379173Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens. Light level control for the system is provided by a dual polarizer first stage. Light exiting from the second polarizer passes through a filter which absorbs a portion of the light and comprises the second stage of light control.Type: GrantFiled: July 9, 2004Date of Patent: May 27, 2008Assignee: KLA-Tencor CorporationInventors: Christopher R Fairley, Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai
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Publication number: 20080007726Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams which illuminate the surface of the wafer from approximately 6 to 39 degrees. Each laser is oriented at an azimuth angle 45 degrees from the orientation of the manhattan geometry on the wafer, and 90 degrees in azimuth from one another. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens.Type: ApplicationFiled: August 14, 2007Publication date: January 10, 2008Applicant: KLA-Tencor CorporationInventors: Christopher Fairley, Tao-Yi Fu, Gershon Perelman, Bin-Ming Tsai
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Patent number: 7259844Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams which illuminate the surface of the wafer from approximately 6 to 39 degrees. Each laser is oriented at an azimuth angle 45 degrees from the orientation of the manhattan geometry on the wafer, and 90 degrees in azimuth from one another. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens.Type: GrantFiled: January 12, 2007Date of Patent: August 21, 2007Assignee: KLA-Tencor CorporationInventors: Christopher R. Fairley, Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai
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Publication number: 20070115461Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams which illuminate the surface of the wafer from approximately 6 to 39 degrees. Each laser is oriented at an azimuth angle 45 degrees from the orientation of the manhattan geometry on the wafer, and 90 degrees in azimuth from one another. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens.Type: ApplicationFiled: January 12, 2007Publication date: May 24, 2007Applicant: KLA-Tencor CorporationInventors: Christopher Fairley, Tao-Yi Fu, Gershon Perelman, Bin-Ming Tsai
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Patent number: 7164475Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens. A brightfield beamsplitter in the system is removable, and preferably replaced with a blank when performing darkfield illumination. Light level control for the system is provided by a dual polarizer first stage.Type: GrantFiled: November 4, 2004Date of Patent: January 16, 2007Assignee: KLA-Tencor Technologies CorporationInventors: Christopher R Fairley, Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai
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Publication number: 20060043283Abstract: An apparatus that comprises material which have different thermal expansion coefficients, combined in such a way that the length of the drift region is variant, and self adjusting with temperature. The adjustment is such as to compensate for the length changes resulting from thermal expansion or contraction in other ion optical elements, such that ions of substantially equivalent mass to charge ratios maintain a constant flight time though the system. This allows for use of standard construction methods for the ion optical elements.Type: ApplicationFiled: August 31, 2004Publication date: March 2, 2006Inventors: Stephen Davis, Lee Earley, Mark Hardman, Adrian Land, Gershon Perelman
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Patent number: 6998607Abstract: An apparatus that comprises material which have different thermal expansion coefficients, combined in such a way that the length of the drift region is variant, and self adjusting with temperature. The adjustment is such as to compensate for the length changes resulting from thermal expansion or contraction in other ion optical elements, such that ions of substantially equivalent mass to charge ratios maintain a constant flight time though the system. This allows for use of standard construction methods for the ion optical elements.Type: GrantFiled: August 31, 2004Date of Patent: February 14, 2006Assignee: Thermo Finnigan LLCInventors: Stephen C. Davis, Lee Earley, Mark Hardman, Adrian Land, Gershon Perelman
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Patent number: 6928143Abstract: A portable apparatus for sanitizing and recovering mail and other materials is disclosed. The apparatus is employed after a known or suspected biological attack or contamination event, such as anthrax. Multiple X-ray sources penetrate mail and other materials, and destroy the biological agents. The apparatus is taken to the location of the biological problem, as opposed to shipping contaminated materials to a fixed facility for recovery. Many safety and practical advantages result from this approach to bio-terrorism or to biological contamination events. The design of this apparatus leads to a self-cleaning feature. Airflow control prevents escape of toxic biological materials into the environment.Type: GrantFiled: April 21, 2003Date of Patent: August 9, 2005Inventors: John Edgar Menear, Sergey Etchin, Gershon Perelman, Jeffrey Allen Moore
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Publication number: 20050062962Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams which illuminate the surface of the wafer from approximately 6 to 39 degrees. Each laser is oriented at an azimuth angle 45 degrees from the orientation of the Manhattan geometry on the wafer, and 90 degrees in azimuth from one another. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens.Type: ApplicationFiled: November 4, 2004Publication date: March 24, 2005Inventors: Christopher Fairley, Tao Fu, Gershon Perelman, Bin-Ming Tsai
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Publication number: 20040252297Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams which illuminate the surface of the wafer from approximately 6 to 39 degrees. Each laser is oriented at an azimuth angle 45 degrees from the orientation of the manhattan geometry on the wafer, and 90 degrees in azimuth from one another. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens.Type: ApplicationFiled: July 9, 2004Publication date: December 16, 2004Applicant: KLA-Tencor Technologies CorporationInventors: Christopher R. Fairley, Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai
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Patent number: 6816249Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams which illuminate the surface of the wafer from approximately 6 to 39 degrees. Each laser is oriented at an azimuth angle 45 degrees from the orientation of the manhattan geometry on the wafer, and 90 degrees in azimuth from one another. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens.Type: GrantFiled: July 17, 2001Date of Patent: November 9, 2004Assignee: KLA-Tencor CorporationInventors: Christopher R Fairley, Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai
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Publication number: 20040208282Abstract: A portable apparatus for sanitizing and recovering mail and other materials is disclosed. The apparatus is employed after a known or suspected biological attack or contamination event, such as anthrax. Multiple X-ray sources penetrate mail and other materials, and destroy the biological agents. The apparatus is taken to the location of the biological problem, as opposed to shipping contaminated materials to a fixed facility for recovery. Many safety and practical advantages result from this approach to bio-terrorism or to biological contamination events. The design of this apparatus leads to a self-cleaning feature. Airflow control prevents escape of toxic biological materials into the environment.Type: ApplicationFiled: April 21, 2003Publication date: October 21, 2004Inventors: John Edgar Menear, Sergey Etchin, Gershon Perelman, Jeffrey Allen Moore
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Patent number: 6785443Abstract: The present invention is directed to a system and method for tuning an optical fiber Bragg grating by using a circular mechanism which uniformly stretches the fiber along its length while at the same time preserving the minimal size for stretching.Type: GrantFiled: January 30, 2002Date of Patent: August 31, 2004Assignee: Teraxion Inc.Inventors: Alexis Mendez, Mario Pacheco, Steve Montesanto, Gershon Perelman, William Wang, Jason Zweiback
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Publication number: 20030012499Abstract: The present invention is directed to a system and method for tuning an optical fiber Bagg grating by using a cicular mechanism which uniformly stretches the fiber along its length while at the same time preserving the minimal size for stretching.Type: ApplicationFiled: January 30, 2002Publication date: January 16, 2003Inventors: Alexis Mendez, Mario Pacheco, Steve Montesanto, Gershon Perelman, William Wang, Jason Zweiback
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Patent number: 6498891Abstract: Temperature compensated fiber stretching is accomplished by amplifying with a unique flexure the relative displacement between a rigid frame and a longitudinal spacing element. For passive compensation, relative displacement results from differential thermal expansion between the frame and the longitudinal spacer. For active thermal compensation and/or for wavelength tuning of an embedded fiber Bragg grating, relative displacement results from combining differential thermal expansion with active feedback length control of the longitudinal spacer. The feedback control can stabilize using length feedback from a displacement sensor or actively control length using temperature feedback, including logic elements, for example algorithms or look up tables. In an optical system, combined passive compensation and active control with flexure amplification provide superior thermal wavelength stability and tuning range.Type: GrantFiled: August 8, 2001Date of Patent: December 24, 2002Assignee: Phaethon CommunicationsInventors: Steve Montesanto, Gershon Perelman, William Wang