Abstract: The invention relates to an apparatus for the determination of the position of a disc-shaped object, particularly of a wafer (10). Thereby, a mount (14) for supporting the sensor device (11) is provided on a movable carrier (22).

Abstract: The invention relates to an apparatus for the determination of the position of a disc-shaped object, particularly of a wafer (10). Thereby, a mount (14) for supporting the sensor device (11) is provided on a movable carrier (22).

Abstract: A method of detecting incomplete edge bead removal from a disk-like object is disclosed. First a peripheral area of a disk-like reference object is imaged. Marks are then defined in the peripheral area of the reference object. Finally, images of peripheral areas of a plurality of disk-like objects of the same batch are recorded. The inspection of the disk-like objects is limited to the locations of the marks defined on the reference object.

Abstract: A method of detecting incomplete edge bead removal from a disk-like object is disclosed. First a peripheral area of a disk-like reference object is imaged. Marks are then defined in the peripheral area of the reference object. Finally, images of peripheral areas of a plurality of disk-like objects of the same batch are recorded. The inspection of the disk-like objects is limited to the locations of the marks defined on the reference object.

Abstract: An apparatus for placing a FOUP on a loadport 20 of a system for processing disc-shaped objects is disclosed. Several light indicators 23 are provided at the loadport 20, which indicate a correct orientation and positioning of the FOUP on the loadport 20 as well as clearance to load or unload the loadport 20. A operating element 30 is arranged at the loadport, which when activated gives clearance for processing the disc-shaped objects in the FOUP.

Abstract: An apparatus for recovery in the system for processing disc-shaped objects is disclosed. The system is provided with an OHT that places and/or removes at least one FOUP containing disc-shaped objects onto and/or off of a loadport. A light barrier arrangement is attached in front of a region of the loadport, which is designed for placing and/or removing a FOUP by means of the OHT. An input device is provided through which the OHT resumes the process of placing and/or removing the FOUP when this is stopped by an interruption of the light barrier arrangement.

Abstract: A sample P is illuminated by a measurement light beam with an incidence angle differing from 0°; light reflected therefrom is detected; intensity values are recorded and evaluated; and the opening of a field stop is imaged onto a receiving surface, thereby generating an image. In such a method, a value of “light” or “dark” is allocated to each intensity value as a function of a brightness threshold; the smallest rectangle that encloses all “light” positions on the receiving surface is determined; the geometric center point of that rectangle is determined; the position of that point is compared with the position on the receiving surface that corresponds to the geometric center point of the image generated by the field stop in the focused state; and a change in the distance between the sample and the imaging optical system corresponding to the distance between the two points is effected.

Abstract: The invention concerns a method for automatic focusing onto the surface of a sample P, in which sample P is illuminated by a measurement light beam 13 that strikes the sample surface at an incidence angle differing from 0°; light reflected therefrom is detected by means of a position-sensitive receiving surface (23); intensity values as allocated to positions on the receiving surface (23) are recorded and evaluated, and the opening of a field stop (7) is imaged onto the receiving surface (23), thereby generating an image that is smaller than the receiving surface (23).