Patents by Inventor Gertraud Thalhammer

Gertraud Thalhammer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning agent and method for cleaning semiconductor wafers
    Patent number: 5695572
    Abstract: A cleaning agent and method are useful for cleaning semiconductor wafers. The aqueous cleaning agent has a pH of 1 to 5, preferably a pH of 1 to 3, and contains at least one surfactant and at least one compound which belongs to a group of compounds comprising succinic acid and its derivatives. To clean the semiconductor wafers, a thin film of cleaning agent is generated on the side faces of the semiconductor wafers, preferably using a mechanical tool.
    Type: Grant
    Filed: August 10, 1995
    Date of Patent: December 9, 1997
    Assignee: Wacker Siltronic Gesellschaft fur Halbleitermaterialien Aktiengesellschaft
    Inventors: Roland Brunner, Georg Hochgesang, Anton Schnegg, Gertraud Thalhammer