Abstract: An organic light emitting display device is manufactured by: preparing a target substrate that includes sub-pixel areas (each having a thin film transistor) and pixel defining areas (each having a conductive layer) between the sub-pixel areas; preparing an ionized deposition material by vaporizing and ionizing a deposition material; applying a ground voltage to one of the sub-pixel areas while applying a voltage having a same polarity as the ionized deposition material to the neighboring ones of the sub-pixel areas and to the pixel defining areas; and depositing the ionized deposition material on the one of the sub-pixel areas to form an organic thin layer while the one of the sub-pixel areas is polarized by an electric field generated by the voltage being applied to the conductive layer of the pixel defining areas.

Abstract: An organic light emitting display device is manufactured by: preparing a target substrate that includes sub-pixel areas (each having a thin film transistor) and pixel defining areas (each having a conductive layer) between the sub-pixel areas; preparing an ionized deposition material by vaporizing and ionizing a deposition material; applying a ground voltage to one of the sub-pixel areas while applying a voltage having a same polarity as the ionized deposition material to the neighboring ones of the sub-pixel areas and to the pixel defining areas; and depositing the ionized deposition material on the one of the sub-pixel areas to form an organic thin layer while the one of the sub-pixel areas is polarized by an electric field generated by the voltage being applied to the conductive layer of the pixel defining areas.

Abstract: A thin film deposition apparatus including a vacuum chamber; a substrate arranged inside the vacuum chamber; a container unit containing a deposition material and including a discharge opening to discharge the deposition material in a vaporized state; a first heating unit configured to heat at least a portion of the container unit; and a vapor discharge tube including a first opening connected to the discharge opening, and a second opening to discharge the vaporized deposition material to an outside of the vapor discharge tube, a length of a path connecting a center of the first opening to a center of the second opening along a centerline of the vapor discharge tube being greater than a length of a straight line interconnecting the centers of the first and second openings, the thin film deposition apparatus being configured to apply an electric field to the vapor discharge tube.