Patents by Inventor Ghuorong V. Zhuang

Ghuorong V. Zhuang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gate stack metrology
    Patent number: 8774359
    Abstract: An x-ray photoelectron spectroscopy apparatus for measuring film stack characteristics, of the type having an x-ray source and an x-ray photoelectron spectroscopy module coupled to a contiguous vacuum environment, including an ultraviolet source and an ultraviolet photoelectron spectroscopy module coupled to the vacuum environment.
    Type: Grant
    Filed: July 28, 2011
    Date of Patent: July 8, 2014
    Assignee: KLA-Tencor Corporation
    Inventors: Ghuorong V. Zhuang, John Fielden