Abstract: To rapidly respond to successive abnormal defect events, a defect alarm system and method comprises counting the defect detection data from a defect scan station using a defect data analysis system and producing a trend chart for the defect detection data. A defect data analysis system analyzes the trend chart at a constant time frame and records the successive abnormal defect events to produce a defect alarm report, and an email system automatically sends out the defect alarm report to notice the responsible engineer timely. After receiving the notice, the engineer compares the received defect distribution map with those of known events in a defect pattern database to judge if the event is a known one to propose a policy.