Abstract: This application relates to a pellicle for extreme ultraviolet lithography used in a lithography process using extreme ultraviolet rays. In one aspect, the pellicle includes a pellicle layer formed of an M-? material in which M is combined with ?. Here, M is one of Si, Zr, Mo, Ru, Y, W, Ti, Ir, or Nb, and ? is at least two of B, N, C, O, or F.

Abstract: The present disclosure relates to a 3D scanning and appearance inspection apparatus for a cylindrical secondary battery, capable of extracting points for 3D model creation and acquiring a surface image for appearance inspection simultaneously while rotating the cylindrical secondary battery. According to the present disclosure, a construction for 3D scanning and appearance inspection for a cylindrical secondary battery can be simplified, accurate 3D data can be acquired, and accurate appearance inspection is possible.

Abstract: A method for fabricating a vertical semiconductor device may include forming a lower-level stack including a source sacrificial layer over a semiconductor substrate; forming an upper-level stack including dielectric layers and sacrificial layers over the lower-level stack; forming a vertical channel structure including a channel layer that penetrates the upper-level stack and the lower-level stack; forming a slit that penetrates the upper-level stack while exposing the source sacrificial layer; forming a lateral recess that extends from the slit by removing the source sacrificial layer; forming a first contact layer which is coupled to a portion of the channel layer while filling the lateral recess; selectively forming a second contact layer over an exposed surface of the first contact layer; and selectively forming a chemical barrier layer over the second contact layer.

Abstract: A display device includes: a substrate; a plurality of transistors disposed on the substrate; an insulating layer disposed on the plurality of transistors; a data line and a driving voltage line disposed on the insulating layer; a pixel electrode disposed on the data line or the driving voltage line; a pixel defining layer disposed on the pixel electrode and including a pixel opening that overlaps the pixel electrode; a light emitting element layer disposed in the pixel opening; and a common electrode disposed on the light emitting element layer, wherein the pixel opening includes a first sub-pixel opening and a second sub-pixel opening and a first blocking portion that is disposed between the first sub-pixel opening and the second sub-pixel opening.

Abstract: Proposed is a pellicle for extreme ultraviolet (EUV) lithography based on metal carbide nanotubes having excellent optical properties, such as EUV transmittance, as well as chemical durability required in the EUV lithography environment. The pellicle may include a frame having an opening formed in a central portion thereof, and a porous pellicle layer supported by the frame, covering the opening, and formed with a mesh structure based on metal carbide nanotubes. A method for manufacturing the pellicle is also proposed.

Abstract: A polyester resin according to the present invention comprises a regenerated bis(2-hydroxyethyl) terephthalate having high purity and containing diethylene glycol ester in an amount controlled below a certain level, and thus has heat resistance and quality comparable to the original resin even though the polyester resin is regenerated through chemical recycling. In particular, a polyester fiber comprising the polyester resin of the present invention has excellent strength, elongation, and processability, and can thus be used as an eco-friendly fiber product.

Abstract: The present invention relates to a method for increasing the flavonoid content in a plant, comprising treating the plant with a sulfur compound; a method for producing a plant with increased flavonoid content; a plant with increased flavonoid content, produced by the production method; an antioxidant composition or food composition comprising the plant, an extract thereof or a fraction thereof; and a composition for increasing the flavonoid content in a plant, comprising a compound represented by Formula (1) or (2) as an active ingredient. The sulfur compounds S17 and 3-(2-S) of the present invention activate the flavonoid pathway, which is a repository of various functional secondary metabolites, and thus, may strongly trigger the accumulation of functional flavonoids when applied to crops, thereby efficiently improving the added value of crops.

Abstract: A rewinding system includes a rewinding apparatus for winding a manufactured thin-film tape on a re-winding roll; a loading apparatus for loading the re-winding roll on which the thin-film tape is rewound; and a cutting apparatus for cutting the thin-film tape. The rewinding apparatus includes first and second mounting members in which re-winding rolls are inserted; and a connecting member connected to an end of each of the first and second mounting members to move the first and second mounting members. The first mounting member rotates around a shaft thereof, the second mounting member rotates around a shaft thereof, and the connecting member rotates the first and second mounting members to change positions of the first and second mounting members, and moves at least one of the first and second mounting members to the place where the loading apparatus is arranged.

Abstract: A pellicle for extreme ultraviolet lithography containing molybdenum carbide is disclosed. The pellicle includes a substrate having an opening formed in a central portion, and a pellicle layer formed on the substrate to cover the opening and including a molybdenum carbide containing layer that contains molybdenum carbide expressed as MoC1-x (0<x<1). The pellicle layer includes a core layer formed on the substrate to cover the opening, and the core layer may be the molybdenum carbide containing layer.

Abstract: A fluid recovery system comprises a communication unit that communicates with the outside and introduces a mixed fluid; and a fluid separation unit that communicates with the communication unit and separates the introduced mixed fluid into at least two different fluids, wherein the fluid separation unit includes a filter member that communicates with the communication unit, receives the introduced mixed fluid, and separates the received mixed fluid into the at least two different fluids; and a collecting member that communicates with the filter member and collects a part of any one fluid of the separated fluids, wherein the communication unit includes a collecting communication unit that communicates with the outside and discharges the part of the any one fluid of the separated fluids; and an exhaust communication unit that communicates with the outside and discharges the other fluids from among the separated fluids.

Abstract: The present invention relates to a haptic device and a haptic module. A haptic device according to the present invention comprises: a housing; a magnetic field generation unit disposed in the housing; an elastic support unit connected to the housing; a vibration unit which is connected to the elastic support unit, and which includes an elastic material in which magnetic particles are dispersed in a matrix; and a control unit for transmitting a signal to the magnetic field generation unit.

Abstract: The present invention relates to a smart transfer system and method for performing three-dimensional (3D) printing output post-processing and loading processes, and the smart transfer system includes a transfer device configured to transfer a basket accommodating an output of a 3D printer, a plurality of process modules configured to perform cleaning, rinsing, drying, and post-curing processes on the output, and a control device configured to set work to be performed on the basis of information about the output, set a work path of the plurality of process modules according to the work, and control the transfer device to move along the work path.

Abstract: A method and apparatus for a messaging service are provided. An operating method of a terminal on which an application for a messaging service is installed includes switching an input mode of a chat interface to an assistant mode to call an assistant function, receiving a call for the assistant function, and displaying an assistant interface corresponding to the called assistant function.

Abstract: This application relates to a pellicle for extreme ultraviolet lithography containing amorphous carbon and a manufacturing method thereof. In one aspect, the pellicle includes a substrate having an opening formed in a central portion, a support layer formed on the substrate to cover the opening, and a pellicle layer formed on the support layer and containing amorphous carbon. The pellicle layer may include a core layer formed on the support layer, and a capping layer formed on the core layer and may further include a buffer layer. At least one of the core layer, the capping layer, or the buffer layer may be an amorphous carbon layer.

Abstract: A printing apparatus includes a stage including a plane extending in a first direction and a second direction crossing the first direction, a first head including first nozzles facing the stage along the first direction, and a second head spaced apart from the first head and including second nozzles facing the stage along the first direction.

Abstract: The present invention relates to a graphene ink composition including charged chemically modified graphene, a graphene flake, a binder and a solvent, wherein an absolute value of the zeta potential of the charged chemically modified graphene is 25 mV or more.

Abstract: A method and an apparatus for a messaging service are disclosed. A method of operating a search server interlinked with a messaging service includes receiving an immediate sharing request of a search result for a search term, obtaining identification information of a search result page corresponding to the search term, obtaining rendering information of the search result page corresponding to the identification information, and generating the rendering information of the search result page as a message transmitted through the chat interface.

Abstract: A vehicular software update system includes a management controller coupled to a vehicle and at least one performance controller that receives software for over-the-air (OTA) update in the background from the management controller. The management controller determines a network load of the vehicle and adjusts a transmission speed of the software for OTA update, the software being transmitted to the at least one performance controller, based on a driving state of the vehicle and the network load of the vehicle.

Abstract: A method for automatically recognizing a location of an object so that a robot can grasp and transfer the product in an apparatus for automatically recognizing a location of an object is provided. The method for automatically recognizing a location of an object obtains one frame from image data of the product produced by the manufacturing facility, detects location and shape information of the product based on a hue, saturation, value (HSV) color space using the frame, generates a recipe for the robot to grasp and transfer the product based on the location and shape information of the product, and transmits the recipe to the robot.

Abstract: Proposed is a method for providing reaction contents by a server. The method may include receiving a request to post a custom content for at least one reaction content and an object related to the custom content on a first user's profile screen from a first user terminal, and in response to a request to view a first user's profile screen from a second user terminal, providing the first user's profile screen comprising the object to the second user terminal. The method may further include providing at least one reaction content for the object to the second user terminal, wherein at least one of the at least one reaction interface is based on the custom content, receiving an interaction with at least one of the at least one reaction interface from the second user terminal, and providing reaction information associated with the interaction to the first user terminal.